Substrate Edge Support with Lift and Rotation for Sag Control
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Solution Overview
Problem
As substrate size increases, supporting and transporting it becomes difficult, leading to sagging and alignment errors during deposition, which decreases the precision and yield of flat panel display manufacturing.
Innovation Solution
A substrate support apparatus with a substrate main holder supporting three sides and a substrate sub-holder supporting the remaining side, featuring a sub-lifting part for vertical movement and a rotation part for angular adjustment, to prevent sagging and ensure precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the area of the substrate is increased, then the productivity is improved, but the weight of the substrate increases making it difficult to transport and support
Solution Approach 1:
The substrate support apparatus is divided into multiple independent support units (first support unit, second support unit, third support unit, fourth support unit) that can be distributed across the substrate. Each support unit independently supports a portion of the substrate, allowing the system to handle large, heavy substrates without requiring a single heavy support structure. This segmentation enables the support of larger substrate areas while maintaining manageable weights for individual support components.
2Ease of operation
If the ends of the four sides of the substrate are supported, then the ease of operation is improved, but sagging occurs in the center of the substrate causing alignment errors
Solution Approach 1:
The support structure is segmented into multiple support units positioned at different locations (first, second, third, and fourth support units corresponding to different sides of the substrate). This segmentation allows the substrate to be supported at multiple points rather than just at the ends, distributing the load and preventing center sagging while maintaining ease of operation.
Solution Approach 2:
The support units are designed with movable components including lifting mechanisms (first lifting part, second lifting part, third lifting part) and rotation mechanisms (first rotation part, second rotation part, third rotation part). These dynamic elements allow the support units to adjust their positions and orientations to precisely match the substrate's requirements, enabling both easy operation and high alignment precision by adapting to the substrate's specific needs.
3Reliability
If a substrate support apparatus supporting all four sides is used, then the reliability is improved, but the device complexity increases
Solution Approach 1:
The support apparatus is segmented into four independent support units, each responsible for supporting one side of the substrate. This segmentation improves reliability by distributing the support function across multiple independent units, so if one unit fails, the others can continue to function. The modular nature of the segmented design actually reduces overall system complexity compared to a monolithic support structure, as each unit can be independently controlled and maintained.
Solution Approach 2:
Each support unit is designed with multiple functions: lifting capability (through lifting parts), rotation capability (through rotation parts), and positioning capability. This multi-functionality means that rather than requiring separate mechanisms for each function, each support unit integrates multiple capabilities, reducing the overall device complexity while maintaining high reliability through comprehensive support functionality.
Data Source
AI summary
A substrate support apparatus includes: a substrate main holder supporting three sides of four sides of a substrate; and a substrate sub-holder supporting a remaining side of the four sides of the substrate; wherein the substrate sub-holder includes: a sub-support part that contacts the remaining side and supports the remaining side; a sub-lifting part that moves the sub-support part along a vertical direction; and a rotation part that rotates the sub-support part at a predetermined angle.