Substrate Processing Ejection Inspection System
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately determining the quality of ejection operations due to interference from reflected light and droplets or mist colliding with the substrate, which complicates inspection and maintenance.
Innovation Solution
A substrate processing apparatus with a light-tight chamber and an ejection inspection system that includes a light emitting part and an imaging part, positioned to capture images of processing liquid droplets outside the substrate, allowing for accurate determination of ejection quality without substrate interference, and a maintenance mechanism for addressing ejection failures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If inspection is performed on substrate with nozzles ejecting processing liquid, then ejection quality can be evaluated, but reflected light from substrate and colliding droplets interfere with camera accuracy
Solution Approach 1:
The inspection system extracts the measurement function from the substrate processing environment by using a light source and camera positioned to observe processing liquid ejection without requiring substrate involvement. The light source irradiates processing liquid from the side, and the camera captures images from an angle that avoids reflected light from the substrate, thereby eliminating substrate-related interference while maintaining ejection quality evaluation capability
Solution Approach 2:
The patent introduces an intermediary inspection system consisting of a light source and camera that mediates between the ejection head and substrate. This intermediary system evaluates ejection quality by observing processing liquid behavior in flight or at the ejection head outlet, rather than directly inspecting the substrate surface, thereby avoiding interference from substrate reflected light and colliding droplets
2Ease of operation
If cup part and substrate receiving structures are disposed around substrate, then substrate processing is enabled, but positioning of camera and light source becomes difficult
Solution Approach 1:
The inspection system is positioned in a different spatial dimension relative to the substrate processing area. The light source and camera are disposed at the side of the ejection head rather than above or around the substrate, utilizing lateral space that is not occupied by the cup part or substrate receiving structures. This dimensional repositioning allows inspection components to be integrated without interfering with substrate processing structures
3Productivity
If inspection is performed during substrate processing, then productivity is improved, but accuracy is reduced due to interference from substrate and processing environment
Solution Approach 1:
The inspection system performs ejection quality evaluation before processing liquid contacts the substrate, using a light source and camera positioned to capture images of processing liquid in flight or at the ejection head outlet. This preliminary inspection action occurs in a controlled optical environment free from substrate reflected light and colliding droplet interference, maintaining high measurement accuracy while enabling continuous processing and improving productivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise evaluation of ejection operations and efficient maintenance by isolating the inspection from substrate-related light interference, improving the accuracy and productivity of substrate processing.
Implementation Method 1
a light emitting part for emitting light along a predetermined light existing plane to irradiate the processing liquid that is ejected from the ejection head toward the standby pod with light
Implementation Method 2
an imaging part for capturing an image of the processing liquid passing through the light existing plane to acquire an inspection image that includes a bright dot appearing on the processing liquid
Data Source
AI summary
In a substrate processing apparatus, an election head from a position above a substrate held by a substrate holding part to an inspection position above a standby pod disposed outside a cup part. At the inspection position, a processing liquid ejected from the ejection head toward the standby pod is irradiated with planar light emitted from a light emitting part. An imaging part acquires an inspection image including bright dots appearing on the processing liquid, and a determination part determines the quality of the ejection operation of the ejection head on the basis of the inspection image. Accordingly, it is possible to eliminate the influence of reflected light from the substrate and droplets, mist, or the like of the processing liquid having collided with the substrate and to accurately determine the quality of the ejection operation of the ejection head.