Package Substrate Embedded Interconnects Electroless Fill

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Solution Overview

Problem

Conventional integrated packages face limitations in routing density and are costly to fabricate, necessitating a cost-effective solution with higher density connections and a lower profile.

Innovation Solution

A package substrate is designed with a dielectric layer, interconnects, and electroless metal layers, featuring embedded interconnects and cavities with selective electroless copper fill, enabling high-density and fine-pitch connections through semi-additive patterning processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional integrated packages use traditional routing methods, then fabrication cost is controlled, but routing density is limited

Engineering Contradiction:
Improverouting densityVSAvoidfabrication cost
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent transitions from planar surface routing to three-dimensional embedded routing by forming cavities within the substrate and filling them with conductive material. This dimensional change allows interconnects to be embedded throughout the substrate volume, dramatically increasing routing density without proportionally increasing surface area or fabrication complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent embeds conductive interconnect structures within nested cavities in the substrate. The cavities are formed within the substrate volume, and conductive material is nested within these cavities, creating a hierarchical nested structure that maximizes routing capacity within the available substrate volume.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of stationary object

If conventional integrated packages use standard package sizes, then fabrication is simplified, but real estate usage is excessive

Engineering Contradiction:
Improvepackage footprintVSAvoidpackage structure
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent moves interconnect routing from the two-dimensional surface plane into the three-dimensional volume of the substrate through embedded cavities. This allows high-density routing without increasing the surface footprint, as the additional routing capacity is achieved by utilizing the vertical dimension and substrate depth.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs thin dielectric layers and flexible cavity structures that can be formed within the substrate. These thin-film dielectric structures allow for high-density embedded interconnects while maintaining a compact overall package profile and minimizing surface area requirements.

Inventive Principle:
Principle #30Flexible shells and thin films

3Length of stationary object

If conventional integrated packages use surface-mounted interconnects, then connectivity is achieved, but profile height is excessive

Engineering Contradiction:
Improvepackage profileVSAvoidconnection reliability
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

The patent embeds conductive interconnects within nested cavities in the substrate, creating a compact nested structure. This nesting approach reduces the overall package profile by integrating interconnects within the substrate volume rather than extending them externally, while maintaining reliable electrical connections through the embedded structure.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent transitions interconnect placement from external surface mounting to internal embedding within the substrate volume. This dimensional relocation reduces the external profile height of the package while establishing reliable electrical connections through the embedded conductive paths within the substrate interior.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves higher routing density and reduced fabrication costs, allowing for more efficient and compact integrated packages with improved connectivity between dies.

Implementation Method 1

a first electroless metal layer is formed in the first cavity

Methodology Applied
Scientific EffectElectroless plating: Electrodeposition

Data Source

PatentEP3130007B1Package substrate comprising surface interconnect and cavity comprising electroless fill
Publication Date: 2021.09.29 QUALCOMM INC
  • EP3130007B1 patent drawingFigure 1~2
  • EP3130007B1 patent drawingFigure 3~4
  • EP3130007B1 patent drawingFigure 5~6

AI summary

Some novel features pertain to a substrate that includes a first dielectric layer, a first interconnect, a first cavity, and a first electroless metal layer. The first dielectric layer includes a first surface and a second surface. The first interconnect is on the first surface of the substrate layer. The first cavity traverses the first surface of the first dielectric layer. The first electroless metal layer is formed at least partially in the first cavity. The first electroless metal layer defines a second interconnect embedded in the first dielectric layer. In some implementations, the substrate further includes a core layer. The core layer includes a first surface and a second surface. The first surface of the core layer is coupled to the second surface of the first dielectric layer. In some implementations, the substrate further includes a second dielectric layer.