Substrate End Effector Protrusion Layout for Stable High-Speed Transfer
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Solution Overview
Problem
Existing end effectors used in substrate processing lack a mechanical clamping mechanism, leading to substrate movement and transfer errors due to increased transferring speed, which compromises transfer stability.
Innovation Solution
An end effector design featuring a paddle with rear and front protrusions, a ring with a circular protrusion, and blades with front protrusions to securely position substrates, utilizing a static friction coefficient of 0.4 or more, attached to a robotic arm capable of vertical, lateral, and rotational motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the transferring speed is increased to improve throughput, then productivity is improved, but the substrate moves relative to the end effector and slips out of place, causing transfer errors and decreasing transfer stability
Solution Approach 1:
The end effector incorporates protrusions at specific locations (front and rear) that create localized contact points with the substrate. These localized contact points distribute the friction force more effectively, preventing substrate movement during high-speed transfer while maintaining overall system productivity.
Solution Approach 2:
The circular protrusion on the ring component provides a curved contact surface that increases the contact area with the substrate. This curved geometry distributes pressure more evenly and enhances friction-based holding capability, preventing substrate slippage during rapid acceleration and deceleration phases of transfer.
2Reliability
If a mechanical clamping mechanism is added to prevent substrate movement, then transfer stability is improved, but the device complexity increases
Solution Approach 1:
The invention replaces complex mechanical clamping mechanisms with a simpler friction-based holding system. The protrusions and rounded edges work together with friction forces to secure the substrate, eliminating the need for additional actuators, clamps, or complex mechanical structures while maintaining transfer stability.
Solution Approach 2:
The end effector design allows the substrate to self-position and self-hold through the interaction between the protrusions and the substrate edges. The friction force generated during normal operation is sufficient to prevent movement, requiring no additional active control mechanisms or complex mechanical intervention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances substrate transfer stability by preventing slipping and dropping, ensuring precise and reliable substrate handling even at higher throughput rates.
Implementation Method 1
a top face having a static friction coefficient of 0.4 or more as measured against the backside of the substrate
Data Source
AI summary
An end effector is disclosed. Exemplary end effector includes a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate; a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate; and a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning a substrate.