Substrate Processing Error Display for Faster Fault Recovery
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses require operators to refer to multiple screens to determine error information such as the erroneous substrate, processing module, error timing, and error cause, which is time-consuming and inefficient, especially when process cycles are repeated.
Innovation Solution
The substrate processing apparatus integrates an information display that presents all error information, including the substrate, processing module, error timing, and cause, in a single screen, facilitating quick recovery processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If error information is displayed on multiple separate screens, then information completeness is improved, but operator time to determine error details increases
Solution Approach 1:
The patent combines multiple error information elements (erroneous substrate identification, processing module identification, error timing, and error cause) that were previously displayed on separate screens into a single integrated display screen, allowing operators to view all error details simultaneously without navigating between multiple screens
Solution Approach 2:
The display screen is designed to serve multiple functions simultaneously by presenting diverse error information types (substrate ID, module ID, timing, cause) in a unified interface, eliminating the need for separate dedicated displays for each error parameter
2Loss of information
If multiple screens are used to display error details, then information organization is improved, but operational efficiency deteriorates
Solution Approach 1:
The patent merges previously separate error information displays into one comprehensive screen that maintains clear organization of different error parameters through structured layout, enabling efficient error recovery without sacrificing information organization
Solution Approach 2:
The patent organizes error information in a multi-dimensional layout on a single screen, using spatial arrangement and hierarchical structure to present complex error data (substrate, module, timing, cause) in an easily navigable format that maintains organization while improving accessibility
Data Source
AI summary
A substrate processing apparatus is provided. The substrate processing apparatus for processing substrates includes a plurality of processing modules that perform predetermined processes on the substrates, and an information display that displays information about an error that occurred in the predetermined processes. The information display displays, in the same screen, a substrate on which a predetermined process in which the error occurred, a processing module which was performing the predetermined process in which the error occurred, the timing at which the error occurred, and a main cause of the error.