Substrate Treatment Exhaust Switching Layout for Mist Control
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Solution Overview
Problem
The existing substrate treating systems face issues with long exhaust pipes that lead to contamination and damage, resulting in decreased throughput due to frequent maintenance, as they are used for various treating liquids and mist accumulation.
Innovation Solution
A substrate treating apparatus with a switching mechanism at the same level as the treatment housing, allowing independent exhaust paths through lateral exhaust pipes, reducing pipe length and minimizing contamination and damage, ensuring smooth gas flow and efficient operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the exhaust pipe is made long to reach the exhaust switching unit positioned higher than the treatment housing, then the exhaust switching unit can be protected from mist, but the exhaust pipe becomes susceptible to contamination and damage, requiring frequent maintenance
Solution Approach 1:
The exhaust system is divided into separate segments: the treatment housing has its own lateral exhaust pipe that connects directly to the exhaust switching unit at the same level, rather than using a single long vertical pipe. This segmentation reduces the length of individual exhaust pipes and eliminates the need for upward extension, thereby reducing contamination and maintenance requirements while still protecting the exhaust switching unit through proper positioning.
2Object-affected harmful factors
If the exhaust switching unit is positioned higher than the treatment housing, then mist is prevented from reaching the exhaust switching unit, but the exhaust pipe length increases leading to more contamination and damage
Solution Approach 1:
Instead of positioning the exhaust switching unit vertically above the treatment housing (vertical dimension), the exhaust pipe is extended laterally at the same level (horizontal dimension). This dimensional change allows the exhaust switching unit to remain protected from mist while avoiding the problems associated with long vertical pipes, such as contamination and damage from treating liquids.
3Device complexity
If a single exhaust pipe is used for multiple treating liquids, then the system is simplified, but the exhaust pipe becomes contaminated and damaged by various chemicals requiring frequent maintenance
Solution Approach 1:
The exhaust system uses separate lateral exhaust pipes for different treatment housings, allowing each exhaust path to be isolated. This segmentation prevents cross-contamination between different treating liquids while maintaining system simplicity through modular design, thereby reducing maintenance frequency without increasing overall complexity.
4Reliability
If the exhaust pipe extends upward to reach the exhaust switching unit, then the exhaust switching unit can be positioned for protection, but gas flow resistance increases and throughput decreases
Solution Approach 1:
The exhaust switching unit is positioned at the same vertical level as the treatment housing, creating an equipotential connection that eliminates the need for gas to flow upward against gravity. This horizontal connection at equal potential levels reduces flow resistance and maintains high gas flow efficiency, thereby preserving throughput while still protecting the exhaust switching unit through lateral positioning.
Data Source
AI summary
A substrate treating apparatus includes a treatment housing, a holder, and a liquid supplying unit. The holder is accommodated in the treatment housing. The holder holds a substrate. The liquid supplying unit is accommodated in the treatment housing. The liquid supplying unit supplies a treating liquid to the substrate held by the holder. The substrate treating apparatus further includes two exhaust pipes. The exhaust pipes are each located on a lateral side of the treatment housing. The exhaust pipes each exhaust gas. The substrate treating apparatus includes a switching mechanism. The switching mechanism is located at a level equal to that of the treatment housing. The switching mechanism switches an exhaust path of the treatment housing to one of the two exhaust pipes.