Integrated Substrate Exposing and Inspecting Apparatus
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Solution Overview
Problem
The existing substrate processing systems face increased workload and installation area requirements due to separate peripheral exposing and substrate inspecting devices, which can lead to system shutdowns if either device encounters an error during processing.
Innovation Solution
A substrate processing apparatus with integrated peripheral exposing and inspecting units, where the control unit manages the processing to skip or stop operations based on errors in either unit, ensuring continuous processing by prioritizing the peripheral exposing process when errors occur in the inspecting unit and vice versa.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate peripheral exposing device and substrate inspecting device are used, then each device can perform its function independently, but the installation area increases and system complexity increases
Solution Approach 1:
The patent combines the peripheral exposing device and substrate inspecting device into a single integrated substrate processing apparatus. The exposing unit and inspecting unit share common components including the substrate holding unit, transport mechanisms, and control systems, thereby reducing installation area while maintaining independent operational capability through modular design that allows either unit to function autonomously when needed.
Solution Approach 2:
The integrated apparatus is designed with multi-functional capabilities where the substrate holding unit and transport system serve both the exposing process and inspecting process. The control unit can selectively activate either the exposing unit or inspecting unit based on process requirements, enabling one system to perform multiple functions without requiring separate dedicated equipment for each function.
2Manufacturing precision
If separate peripheral exposing device and substrate inspecting device are used, then each device can be optimized for its specific function, but the device complexity and workload on substrate transporting device increases
Solution Approach 1:
The patent integrates both exposing and inspecting functions within a single apparatus structure, reducing the number of separate systems required. Shared components such as the substrate holding unit, positioning mechanisms, and control architecture reduce overall system complexity while maintaining the ability to optimize each function's performance through dedicated processing paths and selective activation.
Solution Approach 2:
The apparatus employs universal substrate handling mechanisms that serve both exposing and inspecting operations, eliminating the need for separate transport systems for each function. The control unit intelligently manages resource allocation, activating only the required function (exposing or inspecting) at any given time, thereby reducing operational complexity while preserving functional optimization.
3Area of stationary object
If integrated peripheral exposing and inspecting units are used, then installation area is reduced and workload on transporting device is reduced, but system reliability may decrease if one unit causes shutdown
Solution Approach 1:
The integrated apparatus is designed with segmented functional modules where the exposing unit and inspecting unit operate as independent subsystems with separate error detection and control pathways. When an error is detected in one unit, the control unit can isolate that specific module and continue operating the other unit, preventing system-wide shutdowns while maintaining compact integration that reduces installation area.
Solution Approach 2:
The control unit incorporates error prediction and isolation mechanisms that prepare the system to handle failures in either the exposing or inspecting unit. By implementing redundant control pathways and error containment protocols, the system can anticipate and mitigate the impact of unit failures, maintaining operational continuity despite the integrated design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This integration reduces the workload on the substrate transporting device, minimizes the installation area, and prevents system shutdowns even when errors occur in one of the processing units, maintaining operational continuity.
Implementation Method 1
an irradiation unit that irradiates light and configured to perform the peripheral exposing process by irradiating the light to the peripheral portion of the substrate
Implementation Method 2
an imaging unit that picks up an image and configured to perform the substrate inspecting process that inspects the substrate based on the picked up image
Data Source
AI summary
Provided is a substrate processing apparatus that includes: a peripheral exposing unit that performs a peripheral exposing process by irradiating light to a peripheral portion of a substrate while rotating the substrate held by a substrate holding unit using a rotation driving unit; a substrate inspecting unit that performs a substrate inspecting process based on a picked up image of the substrate while moving the substrate using a movement driving unit; and a control unit. The control unit controls the predetermined substrate processing to be stopped when the peripheral exposing process is included in the predetermined substrate processing and an error occurs in the peripheral exposing unit, and controls the substrate inspecting process to be skipped when no error occurs in both of the peripheral exposing unit and a transport unit, the substrate inspecting process is included in the predetermined substrate processing and an error occurs in the substrate inspecting unit.