Substrate Facing Member Position Detection to Prevent Oxidation
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Solution Overview
Problem
Existing substrate processing apparatuses lack a mechanism to detect the proper positioning of a facing member, which is crucial for effectively blocking the ambient atmosphere and preventing oxidation of the substrate's surface.
Innovation Solution
A substrate processing apparatus is designed with a holding unit, a facing member, a supporting member, a raising/lowering unit, and a detecting unit. The detecting unit is positioned on the supporting member to detect the position of a portion on the facing member, allowing for accurate judgment of the facing member's suitable positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a facing member is introduced to block the ambient atmosphere and prevent oxidation, then substrate surface oxidation is prevented, but the device complexity increases due to the need for additional positioning and detection mechanisms
Solution Approach 1:
The patent replaces complex mechanical positioning detection mechanisms with a camera-based optical detection system. The camera captures images of the facing member's position, and image processing algorithms determine whether the facing member is properly engaged with the holding unit, substituting mechanical sensors and switches with a non-contact optical measurement approach.
Solution Approach 2:
The patent introduces a camera as an intermediary device between the facing member and the control system. Instead of direct mechanical contact or complex sensor arrays, the camera serves as a mediator that optically detects the facing member's position and transmits this information to the control unit for judgment.
2Reliability
If the facing member positioning detection is made more accurate, then the reliability of substrate processing is improved, but the device complexity and cost increase
Solution Approach 1:
The patent employs a camera-based optical detection system instead of mechanical position sensors or complex sensor arrays. The camera captures visual information about the facing member's position, and image processing algorithms analyze this visual data to determine proper engagement, providing accurate detection without the complexity of mechanical measurement systems.
Solution Approach 2:
The patent creates a visual copy (image) of the facing member's position using a camera. This optical copy is then processed through image analysis to determine positioning accuracy. This approach replaces direct physical measurement with optical replication and analysis, simplifying the detection system while maintaining accuracy.
3Ease of operation
If a facing member raising/lowering mechanism is added to enable engagement with the holding unit, then the ease of operation is improved, but the device complexity increases
Solution Approach 1:
The patent implements a dynamic raising/lowering mechanism that allows the facing member to be positioned at different heights. The facing member can be raised to a first height for engagement with the holding unit and lowered to a second height for substrate processing. This dynamic positioning capability simplifies operation by enabling easy engagement and disengagement while maintaining the necessary functional positions.
Data Source
AI summary
A substrate processing apparatus includes a holding unit which holds a substrate horizontally, a facing member which faces an upper surface of the substrate from above and can be engaged with the holding unit, a supporting member which supports the facing member, a raising/lowering unit in which the supporting member is raised and lowered between an upper position at which the supporting member supports the facing member in a state where the facing member is separated above from the holding unit and an engaging position which is a position below from the upper position and at which the holding unit is engaged with the facing member, and a detecting unit which is disposed at the supporting member. The detecting unit detects a position of a portion to be detected which is disposed at the facing member in relation to the detecting unit.