Substrate Inspection Fault Estimation for Attribute Change Misreports

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Solution Overview

Problem

The existing substrate inspection systems have a high misreporting rate due to strict determination criteria, leading to erroneous defect determinations, especially when switching manufacturers or lots, making it difficult to identify fault points and implement countermeasures in substrate processing lines.

Innovation Solution

A substrate processing management system that includes a defect tallying section, attribute change recognition section, fault point estimation section, and countermeasure calling section to automatically estimate fault points and prompt countermeasures when the defect rate exceeds a predetermined value, considering attribute changes in component mounting machines and inspection machines.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the determination criterion for substrate inspection is set strictly to achieve fail-safe condition, then the reliability of defect detection is improved, but the misreporting rate increases leading to erroneous defect determinations

Engineering Contradiction:

Improvereliability of defect detectionVSAvoidaccuracy of defect determination

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent dynamically adjusts the determination criterion parameter based on component attributes. When component attributes change (different manufacturer, lot, or specification), the inspection criterion is automatically modified to match the new component characteristics, thereby maintaining both reliability and accuracy without using a fixed strict threshold

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system implements feedback by continuously monitoring component attributes and using this information to adjust the determination criterion. The attribute change detection unit provides feedback to the determination criterion setting unit, creating a closed-loop system that adapts to changing component characteristics and reduces erroneous defect determinations

Inventive Principle:

Principle #23Feedback

2Reliability

If the determination criterion is set strictly, then defective substrates are reliably identified, but the number of false defect reports increases requiring operator re-inspection

Engineering Contradiction:

Improvereliability of defect identificationVSAvoidtime for operator re-inspection

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

By changing the determination criterion parameter based on component attributes, the system reduces false defect reports while maintaining reliable defect identification, thereby minimizing the need for operator re-inspection and reducing time loss

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system performs preliminary adjustment of the determination criterion based on component attribute detection before inspection occurs. This preliminary action prevents false defect reports from occurring in the first place, rather than requiring post-inspection correction by operators

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If component attributes such as manufacturer or lot are switched, then production flexibility is improved, but the misreporting rate increases due to attribute variations

Engineering Contradiction:

Improveproduction flexibilityVSAvoidinspection accuracy

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The system automatically changes the determination criterion parameter when component attributes such as manufacturer or lot are switched. This allows the inspection system to adapt to different component variations while maintaining inspection accuracy, thereby supporting production flexibility without compromising reliability

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The determination criterion setting unit is designed to handle multiple component types and attributes universally. By detecting component attributes and automatically adjusting the criterion, the system achieves multi-functionality that supports various component variations while maintaining consistent inspection reliability

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Device complexity

If information on component attributes is not shared across substrate processing machines, then system complexity is reduced, but the ability to estimate fault points and implement countermeasures deteriorates

Engineering Contradiction:

Improveinformation sharing complexityVSAvoidtime to implement countermeasures

Core Design Contradiction:

Device complexityVSLoss of time

Solution Approach 1:

The substrate processing management system acts as an intermediary that collects component attribute information from the component mounting machine and shares it with the substrate inspection machine. This intermediary approach enables fault point estimation and quick countermeasure implementation without requiring direct complex integration between all processing machines

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS11503753B2Substrate processing management system

Publication Date: 2022.11.15 FUJI CORP

AI summary

The substrate processing management system for a substrate processing line including a defect tallying section to calculate a defect rate representing a rate of occurrence of substrates or electronic components determined to be defective with the substrate inspection machine, or obtain a number of defective products having substrates or electronic components determined to be defective; an attribute change recognition section to recognize when an attribute, among the attributes of the electronic component, having a possibility of affecting the inspection, has changed in the component mounting machine; a fault point estimation section to estimate, when the defect rate or the number of defective products exceeds a predetermined value, which of the component mounting machine or the substrate inspection machine is a fault point depending on whether an attribute has changed; and a countermeasure calling section configured to call for a defect countermeasure to the estimated fault point.