Substrate Process File Editing With Validity-Coded Setting Display
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing technologies lack an efficient method to identify valid setting items during file editing operations in substrate processing apparatuses, leading to potential errors and inefficiencies.
Innovation Solution
A display processing apparatus is equipped with a memory to store files containing items, setting values, and validity information, allowing for easy identification of valid setting items through a user-friendly interface that classifies process conditions into categories.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If file editing operation is performed without validity information display, then the interface is simpler, but operators cannot easily identify valid setting items leading to potential errors
Solution Approach 1:
The patent applies color coding to visually distinguish valid setting items from invalid ones in the file editing interface. Valid items are displayed with specific color indicators (e.g., green highlights or checkmarks) while invalid items show different indicators (e.g., red highlights or crosses), enabling operators to quickly identify which settings can be safely edited without causing errors.
Solution Approach 2:
The patent segments the file editing interface by categorizing setting items into valid and invalid groups based on their editability. This segmentation is achieved through visual separation techniques such as grouping valid items in one section, using different background colors, or providing distinct visual markers that clearly differentiate between items that can be edited and those that cannot.
2Productivity
If all setting items are displayed without categorization, then the information is complete, but operators have difficulty quickly identifying valid items
Solution Approach 1:
The patent segments the display of setting items by organizing them into categories such as 'valid for editing' and 'invalid for editing'. This segmentation allows operators to quickly locate valid items without sifting through all settings, improving both the speed of identification and the ease of navigation through the interface.
Solution Approach 2:
The patent applies local quality by providing enhanced visual characteristics specifically for valid setting items while keeping other items in a standard or diminished visual state. Valid items receive special treatment through color highlighting, bold formatting, or positional emphasis, making them stand out locally within the overall interface without requiring complete reorganization.
Data Source
AI summary
There is provided a technique capable of easily identifying information related to a valid setting item used in a substrate processing apparatus when performing a file editing in a display processing apparatus. There is provided a technique that includes: a memory configured to store a file containing a plurality of items for each of a plurality of categories, setting values for each of the plurality of items and validity information indicating whether the setting values for each of the plurality of items are valid, wherein process conditions for a substrate are classified into the plurality of categories; a display configured to display the validity information and the setting values for each of the plurality of items classified for each of the plurality of categories on a screen for each of the categories; and a manipulator configured to perform an edit operation on the validity information displayed on the screen.


