Substrate Process File Editing With Validity-Coded Setting Display

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Solution Overview

Problem

Existing technologies lack an efficient method to identify valid setting items during file editing operations in substrate processing apparatuses, leading to potential errors and inefficiencies.

Innovation Solution

A display processing apparatus is equipped with a memory to store files containing items, setting values, and validity information, allowing for easy identification of valid setting items through a user-friendly interface that classifies process conditions into categories.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If file editing operation is performed without validity information display, then the interface is simpler, but operators cannot easily identify valid setting items leading to potential errors

Engineering Contradiction:
Improveaccuracy of setting item identificationVSAvoidinterface complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies color coding to visually distinguish valid setting items from invalid ones in the file editing interface. Valid items are displayed with specific color indicators (e.g., green highlights or checkmarks) while invalid items show different indicators (e.g., red highlights or crosses), enabling operators to quickly identify which settings can be safely edited without causing errors.

Inventive Principle:
Principle #32Color changes

Solution Approach 2:

The patent segments the file editing interface by categorizing setting items into valid and invalid groups based on their editability. This segmentation is achieved through visual separation techniques such as grouping valid items in one section, using different background colors, or providing distinct visual markers that clearly differentiate between items that can be edited and those that cannot.

Inventive Principle:
Principle #1Segmentation

2Productivity

If all setting items are displayed without categorization, then the information is complete, but operators have difficulty quickly identifying valid items

Engineering Contradiction:
Improvespeed of identifying valid setting itemsVSAvoidease of navigating setting items
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The patent segments the display of setting items by organizing them into categories such as 'valid for editing' and 'invalid for editing'. This segmentation allows operators to quickly locate valid items without sifting through all settings, improving both the speed of identification and the ease of navigation through the interface.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by providing enhanced visual characteristics specifically for valid setting items while keeping other items in a standard or diminished visual state. Valid items receive special treatment through color highlighting, bold formatting, or positional emphasis, making them stand out locally within the overall interface without requiring complete reorganization.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250079210A1Display processing apparatus, substrate processing apparatus, display method, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
Publication Date: 2025.03.06 KOKUSAI DENKI KK
  • US20250079210A1 patent drawing
  • US20250079210A1 patent drawing
  • US20250079210A1 patent drawing

AI summary

There is provided a technique capable of easily identifying information related to a valid setting item used in a substrate processing apparatus when performing a file editing in a display processing apparatus. There is provided a technique that includes: a memory configured to store a file containing a plurality of items for each of a plurality of categories, setting values for each of the plurality of items and validity information indicating whether the setting values for each of the plurality of items are valid, wherein process conditions for a substrate are classified into the plurality of categories; a display configured to display the validity information and the setting values for each of the plurality of items classified for each of the plurality of categories on a screen for each of the categories; and a manipulator configured to perform an edit operation on the validity information displayed on the screen.