Substrate Processing Apparatus Film Removal Detection
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Solution Overview
Problem
Existing substrate processing systems require a lengthy adjustment operation to determine if a film on the peripheral portion of a substrate is properly removed, as the measurement settings depend on the type of film, leading to inefficiencies.
Innovation Solution
A control method for a substrate processing apparatus that includes a rotating/holding unit, a processing liquid supply unit, and an imaging unit, which acquires information on the film type, selects appropriate measurement settings from a stored table, and controls the imaging unit to rapidly assess the film removal without depending on the film type.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If measurement settings are manually adjusted based on film type, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The system pre-stores multiple measurement settings corresponding to different film types in a storage unit before actual measurement. When a film type is identified, the corresponding pre-configured measurement settings are automatically retrieved and applied, eliminating the need for manual adjustment during the measurement process. This preliminary preparation of measurement parameters resolves the contradiction by enabling both precise measurement and rapid operation.
2Adaptability or versatility
If manual measurement setting adjustment is performed for each film type, then adaptability is improved, but productivity decreases
Solution Approach 1:
The system creates a universal measurement framework that can handle multiple film types through a single automated process. The storage unit contains measurement settings for various film types, and the control unit automatically selects and applies the appropriate settings based on the identified film type. This multi-functional capability eliminates the need for separate manual adjustment procedures for each film type, thereby maintaining adaptability while significantly improving productivity.
3Productivity
If imaging unit is controlled with pre-stored measurement settings, then productivity is improved, but device complexity increases
Solution Approach 1:
The system uses a storage unit that contains copied measurement settings for different film types, rather than requiring complex real-time calculation or manual configuration capabilities. The control unit simply retrieves and applies these pre-configured settings, which are essentially copies of optimal measurement parameters for each film type. This approach enables rapid productivity improvement while keeping the device structure relatively simple, as the complexity is shifted to the storage and retrieval mechanism rather than requiring complex processing capabilities.
Data Source
AI summary
Whether a film on a peripheral portion of a substrate is appropriately removed is rapidly determined without depending on a kind of the film on the peripheral portion to be removed. An acquisition process S502 of acquiring information upon the kind of the film of the substrate; a selection process S503 of selecting a measurement setting corresponding to the acquired kind of the film from a table for measurement settings previously stored in a storage unit; a control process S504 of controlling an imaging unit 270 to image the peripheral portion of the substrate by using the measurement setting selected in the selection process are provided.