Substrate Inspection Imaging for Uniform Film Thickness
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Solution Overview
Problem
Existing substrate inspection methods fail to accurately control the drying process of organic layers in display devices, leading to non-uniform film thickness and uneven evaporation rates, which affect the performance and quality of display devices.
Innovation Solution
A substrate inspection device and method that includes an imaging part to capture input images, an analysis part to convert brightness data into grayscale data, and a control part to generate a process recipe for precise film shape control, using a machine learning system to optimize the drying process by analyzing and matching the droplet angle and pressure profiles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional substrate inspection methods are used, then the inspection process is simple, but the film thickness uniformity and drying process control are poor
Solution Approach 1:
The substrate surface is divided into multiple pixel regions, with the central region and outer region analyzed separately. This segmentation allows for region-specific drying control, improving film thickness uniformity by addressing the different evaporation rates in different areas of the substrate.
Solution Approach 2:
The imaging part captures images of the substrate during the drying process, and the analysis part processes these images to generate feedback information about film formation. This feedback is used to adjust and optimize the drying process in real-time, achieving precise control of film thickness uniformity.
2Reliability
If the drying process is not precisely controlled, then the process is simple, but the evaporation rate uniformity and film quality are poor
Solution Approach 1:
The system uses an imaging part to automatically capture and analyze the substrate's drying process without manual intervention. The analysis part automatically processes the images and generates control parameters, enabling the drying process to self-optimize for consistent film formation.
Solution Approach 2:
The system changes multiple drying parameters simultaneously, including reduced pressure profile, temperature, and time, based on the analysis of substrate images. This multi-parameter optimization ensures consistent evaporation rates and reliable film formation across the entire substrate.
3Manufacturing precision
If region-specific analysis is performed, then the film shape control is precise, but the data processing complexity increases
Solution Approach 1:
The substrate is divided into pixel regions (central and outer regions) that are analyzed separately. This segmentation enables precise film shape control by identifying and addressing region-specific issues, while the modular analysis approach keeps data processing manageable.
Solution Approach 2:
Different analysis and control strategies are applied to different regions of the substrate. The central region and outer region are treated differently to account for their distinct evaporation characteristics, achieving precise local film shape control without requiring complex global processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control of the drying process, improving film thickness uniformity and enhancing the performance and quality of display devices by ensuring consistent film formation.
Implementation Method 1
an imaging part which is disposed in a chamber and obtains an input image by photographing a substrate coated with a solution
Implementation Method 2
an analysis part which converts brightness data of the input image into grayscale data and analyzes a film shape of a pixel region based on the grayscale data
Implementation Method 3
a substrate inspection device for inspecting a substrate located in a vacuum drying device
Implementation Method 4
the importance of display devices... An organic layer included in the light-emitting element may be formed by a printing process
Data Source
AI summary
A substrate inspection device includes an imaging part that is disposed in a chamber and obtains an input image by photographing a substrate coated with a solution, and an analysis part that converts brightness data of the input image into grayscale data and analyzes a film shape of a pixel region based on the grayscale data.