Substrate Storage Filter Unit Valve Design for Gas Purge
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Solution Overview
Problem
Conventional substrate storing containers face issues with water intrusion during cleaning, chattering noise due to pressure differences, and inefficient gas purge and discharge, leading to prolonged drying times and potential leakage.
Innovation Solution
The design incorporates a filter unit with a ventilation path, a valve body, and an urging member to minimize water intrusion and noise, featuring a larger external opening area and a flared shape to facilitate gas flow and secure sealing, with the exhaust filter unit having a larger effective filter area for efficient gas discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional check valves with springs are used on the exhaust hole side, then the valve can open and close automatically, but the spring pressure causes resistance against gas discharge and leads to leakage of purge gas through the sealing member
Solution Approach 1:
The patent extracts and removes the spring component from the exhaust hole check valve, eliminating the source of resistance against gas discharge. The check valve is designed to open and close automatically using only the pressure differential of the gas flow itself, without any elastic member providing opposing force.
Solution Approach 2:
The patent uses the pneumatic pressure of the gas flow itself to operate the check valve. The valve opens when gas pressure exceeds a certain threshold and closes when pressure equalizes, utilizing fluid pressure dynamics rather than mechanical spring force.
2Object-affected harmful factors
If the substrate storing container is cleaned with washing water, then cleanliness is improved, but water enters the expansion and contraction space for the spring and cannot be completely dried
Solution Approach 1:
The patent removes the spring and its expansion/contraction space from the valve unit structure, eliminating the cavity where water would accumulate and be difficult to dry. Without the spring, there is no enclosed space for water to remain trapped after cleaning.
3Reliability
If the opening area of the ventilation path is reduced to improve sealing, then leakage is minimized, but gas purge efficiency decreases
Solution Approach 1:
The patent applies different opening area characteristics to different parts of the ventilation path. The air supply hole has a smaller opening area for good sealing, while the exhaust hole has a larger opening area for efficient gas discharge. Each location is optimized for its specific function in the gas purge process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces water intrusion and noise, enhances gas purge efficiency, and minimizes leakage, allowing for faster drying and improved operational safety and environmental control.
Implementation Method 1
The filters remove particles, organic matters, moisture and the like that are included in air flowing through the filter from the outside of the container main body
Implementation Method 2
The check valves prevent leakage of gas with which the substrate storage space is filled by the gas purge
Implementation Method 3
an urging member that urges the valve body in a direction of insertion into the outward opening portion
Data Source
AI summary
A housing accommodates: a valve body capable of moving between a closing position and an opening position in an outer opening portion, the closing position closing the outer opening portion and the opening position opening the outer opening portion; a biased member having a tubular shape and connected to the valve body, the biased member supported by the housing so as to be movable in the housing and guiding the movement of the valve body so as to move integrally with the valve body; and a biasing member biasing the biased member so that the valve body moves to the closing position.