Substrate Floatation Height Measurement for Precise Laser Processing
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Solution Overview
Problem
Current substrate-floatation-type laser processing apparatuses face challenges in accurately measuring the floating height of substrates, leading to inefficiencies in laser light irradiation and potential dust generation due to substrate-stage contact.
Innovation Solution
A substrate-floatation-type laser processing apparatus equipped with a floating-height measurement apparatus that uses a laser displacement gauge and height adjustment stage to automatically adjust the distance between the measurement apparatus and the substrate, ensuring precise measurement and control of the floating height, thereby preventing dust generation and improving laser processing performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a floatation stage is used to float and convey a substrate, then the substrate can be positioned for laser processing, but the floating height cannot be measured with satisfactory precision
Solution Approach 1:
The patent introduces an intermediary measurement system consisting of a laser displacement gauge and a mirror mounted on the floatation stage. The laser gauge measures the position of a reference mark on the substrate by detecting reflected light from the mirror, providing precise floating height measurement without direct contact. This intermediary approach resolves the contradiction by achieving high measurement precision while maintaining manageable device complexity through modular component integration.
2Object-affected harmful factors
If the floating height is not precisely measured, then the system remains simple, but dust is generated due to contact between the substrate and the stage
Solution Approach 1:
The patent implements preliminary action by measuring the floating height before laser processing begins and adjusting the floatation stage to maintain optimal clearance between the substrate and stage surface. This preventive measurement and adjustment approach ensures the substrate remains properly suspended throughout the process, preventing contact-induced dust generation without requiring complex real-time monitoring systems.
3Measurement precision
If the distance between the measurement apparatus and the substrate is not automatically adjusted, then the system is simpler to operate, but the measurement accuracy decreases
Solution Approach 1:
The patent implements feedback control by using the laser displacement gauge to continuously monitor the floating height and automatically adjusting the floatation stage position based on measured values. The system compares the measured floating height against a target value and makes real-time adjustments to maintain optimal measurement conditions, thereby achieving high measurement accuracy while automating the adjustment process to preserve ease of operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise measurement and control of the floating height, suppressing dust generation and enhancing the accuracy of laser light irradiation, thus improving the overall performance of laser processing.
Implementation Method 1
a laser displacement gauge 31 for measuring a position of a reference mark 50a provided on the substrate 50
Implementation Method 2
the annealing process is performed over a floatation stage over which a substrate is floated by ejected air
Data Source
AI summary
A substrate-floatation-type laser processing apparatus and a method for measuring a floating height, capable of improving performance of laser processing are provided. A substrate-floatation-type laser processing apparatus according to an embodiment includes a stage configured to float and convey a substrate, and a floating-height measurement apparatus configured to measure a floating height H of the substrate. Note that a distance between the floating-height measurement apparatus and the substrate can be automatically adjusted according to the measured floating height H. The floating height H of the substrate is measured by applying laser light to the substrate and the stage. The distance between the floating-height measurement apparatus and the substrate is adjusted by using a feedback mechanism in which the measured floating height of the substrate is used as an input.