Substrate Liquid Supply Flow Verification Using Cup Level Detection
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Solution Overview
Problem
Existing flow meters in liquid supply units for substrate treatment processes face challenges in accurately measuring and verifying errors, leading to inconsistent liquid supply, which is time-consuming and costly to rectify.
Innovation Solution
A substrate treating apparatus with a flow rate measuring unit that includes a cup, measuring means, and a discharge line with a valve, controlled by a controller to verify flow meter errors by comparing the liquid level in the cup to a preset amount, using level sensors to detect the liquid level accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an operator visually checks the flow rate of liquid discharged from the flow meter, then the flow rate can be checked, but it takes a lot of time and it is difficult to store data automatically
Solution Approach 1:
The patent replaces manual visual inspection with an automated optical measurement system. A camera captures images of the liquid level in a collection container, and image processing algorithms automatically calculate the volume of liquid discharged. This substitution of mechanical/visual methods with optical-digital measurement achieves precise flow rate measurement while eliminating time consumption and enabling automatic data storage.
2Measurement precision
If the flow rate is calculated by measuring the weight of the liquid, then the flow rate can be measured, but calculation work reflecting characteristics of the liquid is necessary and it takes time and cost to install equipment
Solution Approach 1:
The patent utilizes the hydraulic principle of liquid volume measurement through level detection. Instead of weighing the liquid, the system collects discharged liquid in a container with known geometry and measures the liquid level height. The volume is calculated based on the container's cross-sectional area and measured height, eliminating the need for weight measurement equipment and complex liquid characteristic calculations.
Solution Approach 2:
The patent introduces a collection container as an intermediary between the flow meter and the measurement system. This container serves as a mediator that accumulates the discharged liquid, allowing indirect measurement of flow rate through level detection rather than direct weight measurement. This intermediary approach simplifies the measurement system while maintaining accuracy.
3Ease of operation
If a flow meter is set to supply a fixed amount, then liquid supply can be controlled, but if an error occurs in the flow meter, the preset quantity is not supplied to the substrate
Solution Approach 1:
The patent implements a feedback verification system that measures the actual amount of liquid discharged by the flow meter and compares it with the preset quantity. The system collects liquid in a container, measures the liquid level to calculate the discharged volume, and verifies whether it matches the expected amount. This feedback mechanism detects flow meter errors and ensures reliable liquid supply control.
Solution Approach 2:
The patent performs preliminary verification of the flow meter's accuracy before actual substrate processing. By measuring and verifying the liquid discharge amount in advance using the collection container and level measurement system, the system ensures the flow meter is functioning correctly before committing to precision liquid supply operations, thereby preventing errors in preset quantity supply.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and verification of flow meter errors, reducing the need for manual checks and equipment installation, ensuring accurate liquid supply and worker safety.
Implementation Method 1
a level sensor provided in the auxiliary container and for detecting the level of the liquid accommodated in the cup
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space for treating a substrate therein; a support unit configured to support the substrate at the treating space; a nozzle for supplying a liquid to the substrate placed on the support unit; a liquid supply unit configured to supply the liquid to the nozzle and have a flow meter; and a flow rate measuring unit configured to verify an error of the flow meter; and a controller for controlling the liquid supply unit and the flow rate measuring unit, and wherein the flow rate measuring unit comprises: a cup for accommodating the liquid; a measuring means configured to verify a level of the liquid accommodated in the cup; and a discharge line for discharging the liquid within the cup and having a discharge valve installed thereon, and wherein the controller controls the liquid supply unit to discharge a liquid of a first amount to the cup for a first time in a state at which the discharge valve is closed, and controls the measuring means to determine whether an error has occurred in the flow meter by determining whether the level of the liquid accommodated in the cup is the first amount.