Substrate Chamber Flow Visualization Using Pattern Imaging
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Solution Overview
Problem
Existing substrate processing systems lack an effective method to visualize and control the fluid flow distribution within the processing chamber, which can affect the uniformity and quality of the processing results.
Innovation Solution
A substrate processing system that includes a camera, a pattern extending within the camera's field of view, and a map generation unit. The system captures images of the pattern and generates map data indicating the fluid flow distribution based on changes in the image, allowing for visualization and analysis of the fluid flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If a tracer is mixed into the airflow to be visualized, then the fluid flow distribution can be visualized, but the device complexity increases due to additional components like laser beams, optical filters, and tracer injection systems
Solution Approach 1:
The patent extracts and removes the tracer from the system by using a different approach - instead of adding a tracer to the fluid flow, it uses a camera to directly capture images of the fluid flow distribution through the storage space, eliminating the need for tracer injection systems, laser beams, and optical filters
Solution Approach 2:
The patent introduces a camera as an intermediary device that directly observes and captures the fluid flow distribution through the storage space, replacing the complex tracer-based visualization system with a simpler optical imaging system
2Loss of information
If tracer-based visualization methods are used, then fluid flow can be observed, but the manufacturing precision of processing results deteriorates due to potential contamination or interference with the substrate processing
Solution Approach 1:
The patent completely removes the tracer substance from the system, using non-intrusive optical imaging through the storage space to visualize fluid flow, thereby eliminating any risk of tracer contamination or interference with substrate processing operations
Solution Approach 2:
The patent replaces the physical tracer-based mechanical visualization system with an optical imaging system using a camera, which does not require physical contact or introduction of substances into the processing environment, thus preserving substrate processing quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables clear visualization and analysis of the fluid flow distribution, improving the control and uniformity of processing operations, thereby enhancing the quality of processed substrates.
Implementation Method 1
a camera directed toward the storage space; a pattern that is provided to extend within a field of view of the camera and is configured to be captured by the camera through the storage space
Data Source
AI summary
A substrate processing system includes: a substrate processing apparatus including a storage space where a substrate is accommodated; a camera directed toward the storage space; a pattern provided to extend within a field of view of the camera and configured to be captured by the camera through the storage space; and a map generation unit that generates map data indicating a fluid flow distribution in the storage space based on a change of an image of the pattern captured by the camera.