Substrate Processing Flow Recipes for Lower Data Usage
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Solution Overview
Problem
The management computer in substrate processing systems faces increased data storage and transmission requirements due to the growing number of processing conditions, necessitating a reduction in data usage.
Innovation Solution
The substrate processing apparatus generates a flow recipe by combining multiple processing recipes, including liquid and measurement processing recipes, and applies correction formulas based on sensor-acquired indices, allowing for efficient data management and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the number of processing conditions increases, then the processing capability and versatility improve, but the amount of data to be stored and transmitted increases
Solution Approach 1:
The patent segments processing recipes into modular components that can be independently stored and reused. Instead of storing complete flow recipes for every possible processing condition, the system divides recipes into base recipes and condition-specific parameters, allowing combinatorial assembly of processing flows from smaller data units.
Solution Approach 2:
The patent creates universal recipe templates and parameter structures that can serve multiple processing conditions. A single base recipe can be applied across different processing scenarios by varying parameters, eliminating the need to store separate complete recipes for each condition and reducing overall data requirements.
2Adaptability or versatility
If more flow recipes are prepared in advance, then the processing versatility improves, but the storage capacity and transmission speed requirements increase
Solution Approach 1:
The patent implements dynamic recipe generation where flow recipes are assembled in real-time from stored components based on specific processing requirements. Rather than statically storing all possible flow recipes, the system dynamically combines base recipes and parameters to create appropriate processing flows, reducing storage needs while maintaining versatility.
Solution Approach 2:
The patent performs preliminary preparation of recipe components (base recipes, parameter templates, condition definitions) that can be quickly assembled into complete flow recipes when needed. This preliminary structuring of data allows rapid generation of specific processing flows without requiring pre-computation and storage of all possible combinations.
Data Source
AI summary
It is an object of the present invention to reduce the amount of data used in an apparatus, a system, and a method for performing a substrate processing. In order to achieve this object, a substrate processing apparatus includes one or more processing units each for performing a processing on a substrate and one or more arithmetic processing parts. One or more arithmetic processing parts generate a flow recipe defining a flow of a series of processings for a substrate by combining two or more processing recipes among a plurality of processing recipes each defining a processing condition relating to a processing to be performed on a substrate in the one or more processing units. The plurality of processing recipes include a plurality of liquid processing recipes each defining a condition of a processing to be performed on a substrate by using a processing liquid.