Substrate Gripper Segmented Pivoting Fingers for Contamination Control
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Solution Overview
Problem
Existing substrate grippers in electronic device manufacturing are inefficient and prone to particulate contamination during the handling and movement of substrates post-CMP processing, which affects the cleanliness and quality of the manufacturing environment.
Innovation Solution
A substrate gripper apparatus with a body, moveable slide members, finger mounting members, lower and pivoting fingers, and pivot assemblies that provide surface and edge support features, allowing for secure gripping and minimal particulate contamination through the use of synchronized linear actuators and pivot mechanisms to manage substrate orientation and gripping forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If existing gripper mechanisms are used to handle substrates, then substrate transport and gripping functions are provided, but particulate contamination occurs and cleaning quality deteriorates
Solution Approach 1:
The gripper is divided into multiple independent fingers (first lower finger, first pivoting finger, second lower finger, second pivoting finger) that can move and pivot independently. This segmentation allows each finger to be optimized for specific functions: lower fingers provide stable base support while pivoting fingers apply controlled gripping forces, minimizing particulate generation through precise, distributed contact points rather than rigid monolithic gripping
Solution Approach 2:
The gripper employs dynamic elements including slide members that move linearly and pivoting fingers that rotate about pivot axes. The pivoting fingers can adapt their orientation and contact points dynamically during substrate handling, allowing the gripper to maintain secure holding while reducing stress concentrations that would otherwise generate particles. The synchronized movement of multiple fingers creates adaptive gripping that responds to substrate position and orientation changes
2Ease of operation
If conventional gripping methods are used, then substrate handling is achieved, but substrate orientation control and gripping force management are insufficient
Solution Approach 1:
The pivoting fingers rotate about pivot axes to dynamically adjust their orientation and contact points on the substrate. This dynamic capability allows the gripper to accommodate various substrate orientations and positions without requiring complex external positioning systems, as the fingers themselves adapt to the substrate's state
Solution Approach 2:
The gripper structure provides self-alignment and self-adjustment through its mechanical design. The lower fingers and pivoting fingers work together to automatically position and orient the substrate during gripping, with the pivot mechanisms naturally guiding the fingers into optimal contact configurations without requiring additional actuators or control systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The substrate gripper apparatus effectively minimizes particulate contamination by retaining particles within its structure and provides a secure gripping mechanism that ensures substrates are handled cleanly and efficiently, maintaining the integrity of the manufacturing environment.
Implementation Method 1
providing, with the first pivoting finger, a gripping force due to gravity on the substrate
Data Source
AI summary
A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.