Substrate Transport End Effector With Slanted Coupling Grip
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Solution Overview
Problem
Conventional active grip end effectors for substrate transport in semiconductor fabrication facilities face issues with power loss leading to substrate release, varied actuation velocities, and inconsistent gripping forces due to complex linkages and play in gripper actuation, limiting transport speed and increasing the risk of particle contamination.
Innovation Solution
An active grip end effector with a slanted coupling mechanism that provides a direct and rigid connection between the end effector drive section and substrate support tines, ensuring a persistent and constant gripping force even in the event of power loss, and maintaining steady state velocity and gripping force throughout the motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional active grip end effectors with complex linkages are used, then gripping force can be applied to enable higher transport speeds, but the linkages cause varied actuation velocities, inconsistent gripping forces, and delayed gripper actuation
Solution Approach 1:
The patent removes the complex linkage system from the end effector design, replacing it with a direct drive mechanism where the actuator is directly coupled to the gripping elements. This extraction of the problematic linkages eliminates the issues of varied actuation velocities, inconsistent gripping forces, and actuation delays while maintaining the capability to apply sufficient gripping force for high-speed substrate transport
Solution Approach 2:
The patent replaces the mechanical linkage system with a direct actuation mechanism that provides rigid coupling between the actuator and gripping elements. This substitution eliminates the kinematic complexity and play associated with multiple joints and linkages, resulting in more precise and consistent gripping force application during substrate transport
2Speed
If conventional active grip end effectors are used, then higher transport speeds can be achieved, but power loss causes release of the substrate held by the active grip end effectors
Solution Approach 1:
The patent inverts the conventional active grip approach by implementing a mechanism where the gripping force is maintained through a spring-loaded or elastomeric element that naturally applies continuous contact force. The actuator serves to release or modulate the grip rather than continuously maintain it, ensuring that substrate release only occurs when intentionally commanded rather than during power loss events
Solution Approach 2:
The patent incorporates a spring or elastomeric element that provides pre-loaded gripping force before power is applied or lost. This elastic element acts as a cushioning mechanism that maintains substrate contact and prevents unintended release during power interruptions, ensuring reliable substrate holding under varying power conditions
3Reliability
If passive end effectors relying on friction are used, then substrate dislocation is prevented, but operating speeds are limited by the coefficient of static friction
Solution Approach 1:
The patent applies preliminary active gripping force through spring-loaded or elastomeric elements that establish firm substrate contact before transport begins. This pre-applied force ensures reliable substrate holding without relying solely on friction during motion, enabling higher operating speeds while maintaining dislocation prevention through the combination of elastic contact force and controlled actuation
Data Source
AI summary
A substrate processing apparatus having a frame and at least one substrate transport arm connected to the frame. The at least one substrate transport arm having at least one end effector with a first and second substrate support tines, an end effector drive section configured to vary a distance between the first and second substrate support tines, and a slanted coupling that joins each of the first and second substrate support tines to each other substantially rigidly and unarticulated from one of the slanted coupling to another of the slanted coupling, the slanted coupling has a slanted axis of motion wherein each axis of motion of the slanted coupling is slanted with respect to each drive axis of the end effector drive section.