Substrate Gripping Apparatus with Dynamic Guide Member
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Solution Overview
Problem
Conventional substrate gripping apparatuses fail to securely grip substrates, especially during cleaning processes, where liquids are involved, leading to potential liquid bouncing off guide members and inefficient substrate handling.
Innovation Solution
A substrate gripping apparatus with vertically movable support posts and a relative movement mechanism, including springs and a coupling mechanism, allows the substrate holder to grip and release the substrate peripherally while managing liquid discharge, ensuring secure gripping and preventing liquid bouncing through controlled movement of substrate guide members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate guide member is kept in a fixed position, then the substrate can be easily guided to the substrate holder, but liquid bounces off the guide member during cleaning processes
Solution Approach 1:
The substrate guide member is made movable relative to the substrate holder through a relative movement mechanism. When the support post moves upward, the guide member is raised relative to the holder to guide the substrate; when the support post moves downward, the guide member is lowered to prevent liquid bouncing. This dynamic adjustment resolves the contradiction between maintaining fixed guidance and preventing liquid interference.
2Reliability
If the substrate holder grips the substrate tightly, then the substrate is securely held during rotation, but the substrate cannot be properly released for transport
Solution Approach 1:
The substrate holder is designed with a rotatable support shaft that enables dynamic gripping and releasing. The holder can rotate about the support shaft to grip the substrate periphery securely during rotation, and then rotate in the opposite direction to release the substrate for transport. This dynamic mechanical action resolves the contradiction between secure gripping and easy release.
3Object-generated harmful factors
If the support post moves upward to raise the substrate guide member, then liquid bouncing is prevented, but the substrate holder must simultaneously release the substrate
Solution Approach 1:
The relative movement mechanism is designed so that when the support post moves upward, the substrate holder first releases the substrate before the guide member is raised. This preliminary action sequence ensures that the substrate is already released and stable before the guide member position changes, preventing any instability during the transition while still achieving liquid bouncing prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus securely grips substrates and prevents liquid from bouncing back during cleaning processes by synchronizing the movement of substrate holders and guide members, enhancing the efficiency of substrate handling and cleaning operations.
Implementation Method 1
a first spring arranged between the base and the first rod and configured to bias the first rod downward
Implementation Method 2
a second spring arranged between the first rod and the second rod and configured to bias the second rod downward
Data Source
AI summary
The present invention relates to a substrate gripping apparatus includes a base, a plurality of support posts which are vertically movable relative to the base, a lifting mechanism configured to lift the support posts, and a substrate holder and a substrate guide member mounted to each of the support posts. Each of the support posts includes a relative movement mechanism configured to move the substrate holder in such a direction that the substrate holder releases a peripheral portion of a substrate, while raising the substrate guide member relative to the substrate holder, when the support post moves upward, and to move the substrate holder in such a direction that the substrate holder grips the peripheral portion of the substrate, while lowering the substrate guide member relative to the substrate holder, when the support post moves downward.