Substrate Gripping Hand Single Actuator Control
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Solution Overview
Problem
The existing substrate transfer apparatus requires complex control and separate drive units for the movable and auxiliary engagement members, leading to increased energy consumption and complexity in gripping and transferring disc-shaped substrates with potential positional errors.
Innovation Solution
A substrate gripping hand with a base plate, fixed claw, movable claw, and pusher, all driven by a single actuator, which lifts and positions the substrate to correct positional errors, allowing for integrated operation and simplified control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate drive units are provided for the movable engagement member and auxiliary engagement member, then the substrate can be gripped reliably even with positional errors, but the device complexity and energy consumption increase
Solution Approach 1:
The patent combines the drive units for the movable engagement member and auxiliary engagement member into a single integrated drive unit. This merging reduces device complexity and energy consumption while maintaining the ability to grip substrates reliably, as the integrated drive unit coordinates both engagement members through a unified control mechanism
2Ease of operation
If separate drive units are provided for the movable engagement member and auxiliary engagement member, then independent control is achieved, but the control complexity and energy consumption increase
Solution Approach 1:
The patent merges separate drive units into a single integrated drive unit that controls both the movable engagement member and auxiliary engagement member. This reduces energy consumption by eliminating redundant drive mechanisms while maintaining independent control capability through coordinated actuation sequences within the integrated system
3Adaptability or versatility
If multiple engagement members operate independently, then substrate positioning flexibility is improved, but the control timing complexity increases
Solution Approach 1:
The patent implements preliminary action by having the auxiliary engagement member engage the substrate edge before the movable engagement member approaches. This sequential engagement sequence is built into the integrated drive unit's operation, allowing flexible substrate positioning while simplifying control timing through predetermined engagement sequences rather than independent real-time coordination
Data Source
AI summary
A substrate gripping hand includes: a base plate wherein a center line and gripping position are prescribed; at least one fixed claw capable of mating with a substrate edge in the gripping position and provided at a base plate distal end side; a movable claw having an acting portion acting on a substrate edge in gripping position and movable back-and-forth on center line; a pusher having an acting portion acting on an edge lower than the substrate center in a perpendicular orientation and movable back-and-forth parallel with the center line; and an actuator for moving the movable claw and pusher. The pusher acting portion is positioned more to the distal end side than the movable claw acting portion such that the substrate is grasped by the movable claw joint operation and the fixed claw after the substrate is brought to gripping position by the pusher moving forward toward the distal end side.