Substrate Processing Apparatus Guide Portion Design
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Solution Overview
Problem
Existing substrate processing apparatuses face contamination of recovered process liquids due to constantly open recovery ports, require increased height for more process liquids, and incur significant costs when upgrading to accommodate multiple liquids.
Innovation Solution
The apparatus features independently movable guide portions that surround the substrate holding unit, allowing for precise control of process liquid flow and recovery channels to prevent contamination and reduce height, while enabling the recovery of multiple liquids without significant cost increases by reusing existing components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple process liquids are recovered using a substrate processing apparatus with multiple recovery channels, then the capability to handle multiple liquids is improved, but the apparatus height increases due to the need for vertically stacked guards and recovery channels
Solution Approach 1:
The patent transitions from a vertical stacking arrangement of guards and recovery channels to a radial/concentric arrangement where multiple recovery channels are positioned horizontally around the spin chuck. This dimensional change allows multiple process liquids to be recovered simultaneously without increasing apparatus height, as the recovery channels are distributed in the radial direction rather than stacked vertically.
2Ease of operation
If recovery ports are kept constantly open to allow process liquid flow, then the ease of operation is improved, but the purity of recovered process liquids deteriorates due to cross-contamination between different process liquids
Solution Approach 1:
The patent divides the single open recovery port into multiple separate recovery channels, each with its own dedicated opening positioned at a specific radial location. This segmentation allows process liquids to flow freely into their designated channels while preventing cross-contamination, as each channel is spatially separated and receives liquid from a specific angular position around the spin chuck.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures the purity of recovered process liquids by preventing cross-contamination and reduces the apparatus height, allowing for efficient recovery of multiple liquids without substantial cost or height increments.
Implementation Method 1
The first process liquid supplied to the substrate surface is scattered radially outward from the peripheral edge of the substrate by a centrifugal force generated by the rotation of the substrate.
Implementation Method 2
a first guide portion provided around the substrate holding unit and having an upper edge portion extending toward the rotation axis for guiding the process liquid scattered from the substrate rotated by the substrate holding unit to cause the process liquid to flow down
Data Source
AI summary
An substrate processing apparatus includes a substrate holding unit, a process liquid supplying unit, a first guide portion provided around the substrate holding unit for guiding the process liquid scattered from the substrate, a second guide portion provided outside the first guide portion for guiding the process liquid scattered from the substrate, a third guide portion provided outside the second guide portion for guiding the process liquid scattered from the substrate, a first recovery channel provided outside the first guide portion integrally with the first guide portion for recovering the process liquid guided by the second guide portion, a second recovery channel provided outside the first recovery channel integrally with the first guide portion for recovering the process liquid guided by the third guide portion, and a driving mechanism for independently moving up and down the first, second, and third guide portions.