Substrate Processing Guide Portions for Liquid Recovery
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Solution Overview
Problem
Existing substrate processing apparatuses face issues with process liquid contamination, increased cost, and height due to the constant openness of recovery ports, leading to contamination of recovered process liquids and inefficiencies in recovering multiple types of liquids without reducing process throughput.
Innovation Solution
The apparatus features independently movable guide portions with overlapping upper edges to isolate and guide process liquids, preventing contamination and allowing for the recovery of multiple types of liquids without significant cost increases, while maintaining process throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If recovery ports are kept constantly open to maintain process throughput, then productivity is improved, but process liquid contamination occurs and manufacturing precision deteriorates
Solution Approach 1:
The cup is divided into multiple independent recovery channels (first recovery channel, second recovery channel, third recovery channel, and drain channel) that are spatially separated. Each channel has its own dedicated guard and recovery port, preventing cross-contamination between different process liquids while maintaining continuous operation.
Solution Approach 2:
Guards are introduced as intermediary structures that selectively control access to each recovery channel. The guards have lower edges inserted into respective channels and upper edges that define recovery ports, acting as barriers that prevent process liquid from entering adjacent channels while allowing controlled recovery through designated ports.
2Manufacturing precision
If multiple guards are added to separate recovery channels to prevent contamination, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
Multiple recovery channels and their associated guards are integrated into a single cup structure that rotates with the substrate. The channels are arranged concentrically (first, second, and third recovery channels surrounding the substrate, with drain channel on the outer periphery), sharing common structural elements and rotation mechanism, thereby reducing overall system complexity.
Solution Approach 2:
The cup serves multiple functions: it holds the substrate, provides rotational motion, contains all recovery channels, and houses the guards. The rotating mechanism simultaneously positions different recovery ports opposite the substrate periphery for different process liquids, eliminating the need for separate positioning mechanisms for each channel.
3Productivity
If recovery ports are kept open for continuous operation, then productivity is improved, but process liquid contamination occurs
Solution Approach 1:
Guards act as intermediary barriers between the substrate and recovery channels. The lower edges of guards are inserted into the channels while upper edges define open recovery ports, creating a selective barrier that allows process liquid to be recovered through the port while preventing it from entering adjacent channels or the drain channel.
Solution Approach 2:
Each recovery channel has its own dedicated guard with specific positioning and dimensions tailored to that channel's requirements. The guards create localized protection zones around each channel opening, allowing selective control of process liquid flow into each channel while maintaining open ports for continuous recovery operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents contamination of recovered process liquids, reduces the apparatus height, and allows for the recovery of multiple types of liquids without increased costs, improving the purity and efficiency of the process.
Implementation Method 1
a substrate holding mechanism which generally horizontally holds a substrate and rotates the substrate about a generally vertical rotation axis
Data Source
AI summary
A substrate processing apparatus comprises a substrate holding mechanism, a process liquid supplying mechanism supplying a process liquid, a first guide portion around the substrate holding mechanism having an upper edge portion extending toward the rotation axis for guiding scattered process to flow down, a second guide portion provided around the substrate holding mechanism outside the first guide portion and having an upper edge portion extending toward the rotation axis as vertically overlapping with the upper edge portion of the first guide portion for further guiding the scattered process liquid to flow down, a recovery channel provided outside and integrally with the first guide portion for recovering the process liquid guided by the second guide portion, and a driving mechanism for moving up and down the first guide portion and the second guide portion independently of each other.