Substrate Transfer Hand Optical Axis Calibration With Target Jig
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional methods for calculating the positional deviation of a photoelectric sensor's optical axis in a substrate transfer robot are complex and not precise, requiring intricate calculations to determine the deviation based on detected positions.
Innovation Solution
A method involving a series of search processes using a calibration jig with target bodies to detect the optical axis deviation by moving the hand in radial directions, calculating the inclination and positional deviation based on differences between detected positions, and using a controller to operate the robot for precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional calibration methods using small circle plate are used, then optical axis deviation can be detected, but the calculation process becomes complicated and operationally complex
Solution Approach 1:
The patent introduces a calibration jig with a specifically designed reflective surface as an intermediary object. This jig serves as a mediator between the photoelectric sensor and the substrate, providing known geometric reference points that simplify the calculation of optical axis deviation. The reflective surface and specific geometry of the calibration jig enable straightforward trigonometric calculations compared to the complex edge-detection methods previously required.
2Measurement precision
If multiple detection angles are used to calculate optical axis deviation, then measurement accuracy improves, but the number of detection operations and calculation steps increases
Solution Approach 1:
The calibration jig is pre-configured with a reflective surface and geometric features at specific positions before the actual substrate transfer operation. This preliminary setup establishes known reference points that remain valid throughout operation, eliminating the need for repeated complex detection sequences. The pre-established geometric relationships allow for rapid calculation of optical axis deviation using simple trigonometric formulas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies and precisely calculates the optical axis deviation, reducing operational errors and enhancing the accuracy of substrate handling in substrate transfer robots.
Implementation Method 1
a photoelectric sensor provided to a tip-end part of the hand
Data Source
AI summary
A method of detecting a substrate hold hand optical axis deviation includes: acquiring a hand reference turning position at which an ideal optical axis extends in a horizontal first direction; performing a first search processing; performing a second search processing similar to the first search processing to a second target body; and detecting an optical axis inclination from the ideal optical axis based on a difference between the positions detected in the first search processing and the second search processing. A distance in the second direction from the turning axis to the first target body is equal to a distance in the second direction from the turning axis to the second target body. On the hand, an intersecting position between the optical axis and the first target body is different from an intersecting position between the optical axis and the second target body.