Substrate Transfer Hand Height Control for Thin Wafer Bending
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Solution Overview
Problem
Current substrate transport devices face difficulties in transporting thinner and larger-diameter substrates due to increased bending issues, making it challenging to handle them suitably.
Innovation Solution
A substrate treating apparatus with a carrier platform and a transport mechanism that includes a hand with a height-adjustable unit, controlled by a controller to accommodate substrates of varying shapes and sizes, ensuring proper insertion and support between shelves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrates are made thinner and larger in diameter to increase capacity, then substrate processing efficiency is improved, but substrate bending increases making transport difficult
Solution Approach 1:
The hand's height position is dynamically adjusted based on the substrate shape detection results. The controller changes the height position of the hand when inserted between shelves depending on the detected substrate shape, enabling the transport mechanism to adapt to different substrate configurations and prevent bending during transport
Solution Approach 2:
The system uses substrate shape detection to provide feedback for controlling the hand's height position. The controller receives detection results and automatically adjusts the hand position accordingly, creating a closed-loop control system that ensures proper substrate handling without bending
2Device complexity
If a fixed height hand is used for substrate transport, then device complexity is reduced, but the ability to handle various substrate shapes is limited
Solution Approach 1:
The hand is designed with dynamic height adjustment capability through a hand driving unit. The controller changes the height position of the hand based on detected substrate shapes, transforming a static structure into an adaptive system that can handle various substrate configurations
Solution Approach 2:
The system automatically detects substrate shapes and self-adjusts the hand's height position without manual intervention. The controller autonomously controls the hand driving unit based on detection results, enabling the system to adapt to different substrates independently
Data Source
AI summary
A substrate treating apparatus includes a carrier platform, a transport mechanism, and a controller. The carrier platform places a carrier thereon. The carrier includes a plurality of shelves arranged in an up-down direction. The shelves are each configured to place one substrate thereon in a horizontal posture. The transport mechanism is configured to transport a substrate to a carrier placed on the carrier platform. The controller controls the transport mechanism. The transport mechanism includes a hand and a hand driving unit. The hand supports a substrate. The hand driving unit moves the hand. The controller changes a height position of the hand when the hand is inserted between two of the shelves adjacent to each other in the up-down direction, depending on a shape of a substrate taken from or placed on one of the shelves by the transport mechanism.