Substrate-Holding Hand Imaging for Wafer and Hand Misalignment Detection
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Solution Overview
Problem
Existing semiconductor production apparatus systems face challenges in detecting the states of substrates, components of the apparatus, and substrate-holding hands due to limitations in optical sensors, which cannot effectively capture images outside their detection area or detect misalignment of the substrate-holding hands.
Innovation Solution
A semiconductor production apparatus system incorporating a substrate-holding hand with a first and second blade support, equipped with an image capturer in the second blade support, allows for capturing images of substrates, components, and substrate-holding hands, using a controller to analyze these images and detect states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical sensor is used to detect substrate placement states, then detection can be performed within the sensor's detection area, but it cannot detect states outside the detection area or detect misalignment of the substrate-holding hand itself
Solution Approach 1:
The patent uses an image capturer (camera) to capture optical images of substrates, components, and the substrate-holding hand, creating a visual copy of the inspection target. This optical copy can be analyzed to detect placement states, misalignment, and other conditions across a wider area than traditional point-based optical sensors, resolving the contradiction between detection precision and detection coverage.
2Adaptability or versatility
If light emitters and light receivers are arranged corresponding to components to detect their states, then component detection is possible, but the system complexity increases and the substrate-holding hand misalignment cannot be detected
Solution Approach 1:
The image capturer serves multiple functions: it detects substrate placement states, inspects component conditions (such as storage deterioration and consumable consumption), and detects substrate-holding hand misalignment. This single multi-functional device replaces what would otherwise require multiple specialized sensors and light emitters/receivers, reducing system complexity while maintaining versatile detection capability.
3Loss of time
If an optical sensor is mounted on the substrate-holding hand to detect substrate placement, then real-time detection is possible, but the sensor cannot detect the hand's own misalignment
Solution Approach 1:
Instead of mounting the image capturer on the substrate-holding hand (which would prevent self-detection), the patent positions the image capturer on the second blade support, which is independent of the first blade support. This inverted arrangement allows the image capturer to objectively capture images of both the substrates and the substrate-holding hand, enabling detection of hand misalignment while maintaining real-time inspection capability.
4Adaptability or versatility
If multiple separate detection systems are used for substrates, components, and substrate-holding hands, then comprehensive detection is possible, but the apparatus complexity increases
Solution Approach 1:
The image capturer is designed as a universal inspection device that can detect all three inspection targets (substrates, components, and substrate-holding hands) using a single imaging system. The controller processes the captured images to extract information about different targets, eliminating the need for separate detection systems and reducing overall apparatus complexity while maintaining comprehensive detection scope.
Data Source
AI summary
A semiconductor production apparatus system includes a substrate-holding hand including a first blade support and a second blade support. The semiconductor production apparatus system includes an image capturer for capturing an image of an inspection target including at least one of substrates, a component of a semiconductor production apparatus and the substrate-holding hand, and a controller for detecting a state of the inspection target based on the captured image captured by the image capturer. The image capturer is arranged in the second blade support.