Substrate Transport Hand with Movable Support for Multi-Position Handling
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Solution Overview
Problem
Existing substrate transport hands face challenges in efficiently supporting and transporting substrates of different sizes and types without causing contact or damage, particularly in semiconductor manufacturing processes where precise handling is critical.
Innovation Solution
A substrate transport hand with a hand body portion, multiple receiving portions, and movable support portions that allow for the independent positioning of substrates on different vertical positions, preventing contact and ensuring stable support through stepwise structures and air cylinder movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a substrate transport hand uses a single receiving portion to support substrates, then the device complexity is low, but it cannot simultaneously support multiple substrates at different positions
Solution Approach 1:
The substrate transport hand is divided into multiple independent receiving portions (first receiving portion and second receiving portion) that can be positioned at different locations. Each receiving portion can independently support a substrate, enabling simultaneous support of multiple substrates at different positions without requiring a completely new design
2Reliability
If substrates are transported at the same position, then the device complexity is low, but substrates of different types cannot be handled without contact or damage
Solution Approach 1:
The invention transitions from supporting substrates at a single position to supporting them at multiple positions in three-dimensional space. The first receiving portion and second receiving portion are arranged at different locations, allowing substrates of different types to be handled separately without contact or damage
3Adaptability or versatility
If the substrate transport hand is designed to handle different substrate sizes, then the adaptability is improved, but the device complexity increases due to multiple receiving portions
Solution Approach 1:
The first receiving portion and second receiving portion are designed with universal functionality to accommodate different substrate sizes and types. Each receiving portion can adapt to hold various substrates, providing multi-functionality without requiring separate specialized structures for each substrate type
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the simultaneous and stable transport of treated and untreated substrates by using distinct receiving portions, preventing contact and ensuring secure positioning, thus enhancing the reliability and efficiency of substrate handling in semiconductor manufacturing.
Implementation Method 1
a fourth receiving portion (541) movably provided on the hand body portion (51) for supporting the second substrate (10b) received on the second receiving portion (522) along with the second receiving portion (522) when moved to a first position of the hand body portion (51)
Data Source
AI summary
This substrate transport hand includes a first receiving portion and a second receiving portion capable of receiving a first substrate and a second substrate thereon respectively, a third receiving portion supporting the first substrate received on the first receiving portion along with the first receiving portion, and a fourth receiving portion movably provided on a hand body portion for supporting the second substrate received on the second receiving portion along with the second receiving portion when moved to a first position of the hand body portion.