Substrate Holding Hand With Rolling Edge Contact for Vertical Transfer
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Solution Overview
Problem
The existing substrate conveying apparatus faces issues with frictional force generation when holding substrates with a circular plate shape in vertical or inclined postures, leading to uneven engagement with groove deep portions and potential stress on the substrate during handling.
Innovation Solution
A substrate holding hand with a base plate, engaging claws, and rotating bodies is designed to engage with the substrate's edge, where the rotating bodies push the substrate upward while rotating along its edge, reducing frictional force and facilitating smooth movement to the holding position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the movable engaging member is moved forward to push the substrate into the groove deep portions, then the substrate can be held, but frictional force increases and the substrate may not be smoothly moved to the holding position
Solution Approach 1:
The patent introduces rotating bodies with curved surfaces that contact the substrate edge. These rotating bodies roll along the substrate edge during the pushing motion, converting sliding friction into rolling friction. The curved surface of the rotating bodies matches the cylindrical edge of the substrate, enabling smooth rolling contact that significantly reduces frictional force compared to direct sliding contact between the movable engaging member and the substrate.
Solution Approach 2:
The rotating bodies act as intermediary elements between the movable engaging member and the substrate. Instead of the movable engaging member directly contacting and sliding against the substrate edge, the rotating bodies are pressed against the substrate edge by the movable engaging member. This intermediary mechanism allows the substrate to be pushed while the rotating bodies rotate, reducing direct friction and preventing substrate damage.
2Ease of operation
If the substrate is pushed by the movable engaging member, then the substrate can be moved to the holding position, but unnecessary stress is generated on the substrate
Solution Approach 1:
The rotating bodies with curved surfaces conform to the cylindrical edge of the substrate, distributing the contact force over a larger area and reducing stress concentration. The rolling motion of the rotating bodies also reduces the magnitude of force required to move the substrate, thereby reducing stress on the substrate during the movement process.
Solution Approach 2:
The rotating bodies serve as stress-distributing intermediaries between the movable engaging member and the substrate. By pressing the rotating bodies against the substrate edge and allowing them to rotate, the force is applied more gradually and evenly, preventing sudden stress spikes that could damage the substrate while still achieving effective movement to the holding position.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces frictional force and prevents unnecessary stress on the substrate, enabling smooth handling and positioning of substrates with circular plate shapes in vertical or inclined postures.
Implementation Method 1
reducing frictional force generated between the substrate holding hand and the substrate
Data Source
AI summary
Substrate holding hand including a base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate, engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate, moving portion at base end side of holding position and configured to move toward tip end side, and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.