Substrate Head Cleaning Unit Steam Suction
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Solution Overview
Problem
Inkjet technology for high-resolution display elements faces challenges with nozzle clogging and ink solidification, leading to reduced processing efficiency and increased ink consumption during high-pressure purges.
Innovation Solution
A cleaning unit with a first cleaning member that sprays a cleaning liquid in the form of steam and a second cleaning member that forms a suction space with the head to remove impurities by providing reduced pressure, effectively addressing nozzle clogging and ink solidification issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high-pressure ink is supplied to the head to purge solidified ink, then solidified ink can be removed from the head, but a very large amount of ink is consumed
Solution Approach 1:
The patent applies pneumatic principles by using a suction unit that generates negative pressure (vacuum) to remove solidified ink from the head. Instead of using high-pressure ink flow to purge the head, the system uses a suction pump to create a pressure difference that draws out the solidified ink through suction holes, significantly reducing ink consumption while maintaining head functionality.
Solution Approach 2:
The patent replaces the mechanical/pressure-based ink purge system with a suction-based removal system. Rather than relying on high-pressure ink flow to dislodge and transport solidified ink, the system uses a suction unit with suction holes to mechanically extract the ink, substituting the ink-pressure mechanism with a dedicated suction mechanism.
2Reliability
If high-pressure purge operation is performed to remove solidified ink, then solidified ink can be removed from the head, but the head replacement cycle is shortened due to increased unusable nozzles
Solution Approach 1:
The suction unit uses negative pressure to gently remove solidified ink without the high-pressure forces that damage nozzle structures. By creating a controlled vacuum environment through suction holes, the system extracts ink without subjecting the head to stress that would render nozzles unusable, thereby extending the head's operational lifespan.
Solution Approach 2:
The patent converts the harmful effect of solidified ink (which blocks nozzles) into a removable contaminant by using suction. Instead of allowing ink solidification to accumulate and damage the head, the system continuously or periodically applies suction to extract the solidified ink before it causes irreversible damage, turning a potential failure mode into a manageable cleaning process.
3Reliability
If high-pressure purge operation is performed to remove solidified ink, then solidified ink can be removed from the head, but processing efficiency decreases due to increased unusable nozzles
Solution Approach 1:
The suction-based cleaning system uses negative pressure to remove solidified ink without causing the nozzle damage associated with high-pressure purging. This maintains a higher percentage of functional nozzles, thereby sustaining higher productivity levels as more nozzles remain usable for substrate processing over time.
Solution Approach 2:
The suction unit enables the head to be cleaned in-situ without requiring removal or complex disassembly. The suction holes are positioned to access the interior of the head, allowing the system to perform self-maintenance that prevents nozzle clogging and maintains processing efficiency without interrupting production flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution effectively removes solidified ink from the head, extends the head replacement cycle, and reduces ink consumption, thereby improving the efficiency and reliability of the inkjet process.
Implementation Method 1
a first cleaning member that sprays a cleaning liquid in the form of steam
Implementation Method 2
a first cleaning member that sprays a cleaning liquid in the form of steam
Implementation Method 3
a second cleaning member that forms a suction space in combination with the head when being in close contact with the head, and removes impurities attached to the head by providing a reduced pressure to the suction space
Data Source
AI summary
Disclosed is a substrate processing apparatus. The substrate processing apparatus includes a head unit including a head having at least one nozzle for ejecting a treatment liquid to a substrate and a cleaning unit that cleans the head, wherein the cleaning unit includes a first cleaning member that sprays a cleaning liquid to the head; and a second cleaning member that forms a suction space in combination with the head when being in close contact with the head, and removes impurities attached to the head by providing a reduced pressure to the suction space.