Multilayer Substrate Support Heater Grid for Local Thermal Control
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Solution Overview
Problem
Substrate processing systems face challenges in achieving localized thermal control without the need for complex and costly switches, which increase manufacturing complexity and reduce reliability.
Innovation Solution
A substrate support assembly with a heater array comprising resistive heaters arranged in X rows and Y columns, directly connected to bus lines and a controller, eliminating the need for switches by using direct connections to achieve graded heat distribution and localized temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If switches are used to control individual heaters for localized thermal control, then temperature control precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The heater array is segmented into multiple independently controllable heating zones arranged in rows and columns. Each zone can be individually activated or deactivated by controlling the power supply to specific row and column conductors, enabling localized thermal control without requiring physical switches at each heater location.
Solution Approach 2:
The patent transitions from a one-dimensional array of heaters with individual switches to a two-dimensional grid system where heaters are controlled through the intersection of row and column conductors. This dimensional approach allows any heater to be controlled by combining row and column power control, eliminating the need for individual switches while maintaining precise localized control.
2Measurement precision
If switches are used for each heater in the heater array, then localized temperature control is achieved, but reliability decreases due to more failure points
Solution Approach 1:
The patent extracts and removes the switches from the heater control system entirely. Instead of incorporating switches at each heater location or in the control circuitry, the system uses direct power supply control to row and column conductors, eliminating the switching components that would create potential failure points while maintaining the ability to control individual heaters.
Solution Approach 2:
The heater array system controls itself through the inherent electrical properties of the conductor grid. By controlling which rows and columns receive power, the system automatically activates or deactivates specific heaters without requiring external switching mechanisms, reducing complexity and improving reliability.
3Ease of manufacture
If a simple heater array without switches is used, then manufacturing complexity is reduced, but localized thermal control capability is lost
Solution Approach 1:
The heater array is segmented into multiple independently controllable heating zones arranged in rows and columns. Each zone can be individually activated or deactivated by controlling the power supply to specific row and column conductors, enabling localized thermal control without requiring physical switches at each heater location.
Solution Approach 2:
The row and column conductors serve multiple functions simultaneously. Each conductor can work with any other conductor in the perpendicular direction to control a specific heater, providing universal control capability across the entire heater array through a simple two-wire interface per heater.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the manufacturing process, enhances reliability, and reduces costs while providing effective localized temperature control for substrate processing without the use of switches.
Implementation Method 1
N resistive heaters arranged in X rows and Y columns and coupled to the ceramic plate
Data Source
AI summary
A substrate support assembly for supporting a substrate includes a baseplate, a ceramic plate arranged on the baseplate, and N resistive heaters arranged in X rows and Y columns and coupled to the ceramic plate. X, Y, and N are integers greater than 1, and N is less than or equal to X*Y. Each of the N resistive heaters have a first terminal and a second terminal. The ceramic plate includes Y conductors arranged in a first layer of the ceramic plate, and X conductors arranged in a second layer of the ceramic plate. The first terminals of each resistive heater in one of the X rows are directly connected to the Y conductors, respectively, by first vias. Second terminals of each resistive heater in the one of the X rows are directly connected to one of the X conductors by second vias.