Substrate Heater Segmentation for Contact Failure Prevention
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Solution Overview
Problem
Conventional substrate processing apparatuses face reliability issues due to damage and contact failures of heating device parts, leading to unstable heating during continuous operation.
Innovation Solution
A substrate processing apparatus with a dual-heater configuration, where a first and second heater are accommodated within a substrate support, and a supporting unit holds the heater power supply lines and connection mechanisms, along with a temperature detector to monitor and control the temperature, preventing overheating and damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single heating device is used to heat the substrate, then the device complexity is reduced, but the reliability deteriorates due to contact failures and damage during continuous operation
Solution Approach 1:
The heating device is divided into multiple independent heating elements (first heating element, second heating element, third heating element) that can operate independently. Each heating element has its own power supply line and connection mechanism, allowing one element to continue functioning even if another fails, thereby improving overall heating reliability without requiring a completely redundant system.
Solution Approach 2:
The patent incorporates a temperature detector that monitors the temperature of the substrate support in advance. When the temperature exceeds a predetermined threshold, the system automatically adjusts or stops power supply to prevent overheating and potential damage to heating elements, providing a safety buffer before failure occurs.
2Productivity
If heating devices are continuously operated to maintain productivity, then the productivity is improved, but the reliability deteriorates due to part damage and contact failures
Solution Approach 1:
The temperature detector continuously monitors substrate support temperature during operation. When temperature approaches dangerous levels, the system preemptively adjusts power supply or stops heating, preventing contact failures and part damage before they occur, thus maintaining reliable continuous operation.
Solution Approach 2:
The system implements a feedback mechanism where the temperature detector continuously provides temperature information to the power source, which automatically adjusts power supply levels. This closed-loop control ensures the heating device operates within safe parameters during continuous operation, preventing degradation and maintaining reliability.
3Reliability
If multiple heating elements are installed to improve reliability, then the reliability is improved, but the device complexity increases due to multiple power supply lines and connection mechanisms
Solution Approach 1:
The heating system is segmented into multiple independent heating elements, each with its own power supply line and connection mechanism. This segmentation allows the system to maintain heating stability through redundancy while organizing the complexity into modular, manageable units that can be independently controlled and monitored.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a stable and reliable heating process, reducing the risk of part damage and extending maintenance intervals, while ensuring uniform substrate heating and reducing operational costs.
Implementation Method 1
the substrate is then heated by a thermal conduction from the heated electric resistance heating device
Implementation Method 2
a temperature detector connected to the supporting unit, the method including steps of: (a) supporting the substrate by the substrate support in the processing chamber; and (b) heating the substrate supported by the substrate support using the heater accommodated in the substrate support, and wherein the temperature detector detects a temperature of the supporting unit during the step (b)
Data Source
AI summary
A stable and highly reliable device for detecting damage or contact failures of respective parts is provided. The device includes a processing chamber for processing a substrate; a heater for heating the substrate; a substrate support accommodating the heater and installed inside the processing chamber; a shaft for supporting the substrate support; a wire inserted through the shaft; a supporting unit for holding the wire; and a temperature detector connected to the supporting unit.