Substrate Liquid Processing Heating Control
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Solution Overview
Problem
Conventional substrate liquid processing apparatuses face issues with rapid heating of processing liquids, leading to excessive boiling and contamination due to uncontrolled temperature and concentration management, particularly after maintenance when the concentration of the processing liquid is reduced.
Innovation Solution
A substrate liquid processing apparatus equipped with a controller that measures concentration and temperature, calculates the boiling point, and adjusts the heating unit's output to prevent strong boiling, using a concentration and temperature control method that maintains a constant output when approaching the boiling point and adjusts based solely on temperature once the boiling point is reached.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the processing liquid is heated rapidly to improve throughput, then the heating efficiency is improved, but excessive boiling and contamination occur
Solution Approach 1:
The system uses temperature sensors to continuously monitor the processing liquid temperature and feeds this information back to the heating unit controller. The controller adjusts the heating output based on the temperature feedback to maintain precise temperature control, preventing excessive boiling while maintaining efficient heating. This closed-loop feedback mechanism resolves the contradiction by enabling rapid yet controlled heating.
Solution Approach 2:
The system dynamically changes the heating parameters (power output, heating rate) based on the current temperature and concentration conditions. By adjusting the heating parameters in real-time according to measured temperature and concentration values, the system achieves rapid heating when needed while preventing excessive boiling when approaching target temperatures or when concentration varies.
2Loss of time
If the heating output is increased to reduce processing time, then the processing speed is improved, but temperature control precision deteriorates
Solution Approach 1:
The heating system transitions from static fixed-output heating to dynamic variable-output heating. The heating unit's output is continuously adjusted based on real-time temperature measurements and concentration data. This dynamic control enables the system to apply high heating power when far from target temperature (reducing processing time) while automatically reducing power near the target temperature (maintaining precision).
Solution Approach 2:
Temperature feedback from sensors continuously informs the heating controller about the current state, enabling real-time adjustment of heating output. This feedback mechanism allows the system to maintain precise temperature control throughout the heating process, resolving the trade-off between heating speed and temperature precision.
3Device complexity
If conventional temperature-only control is used, then the control system is simple, but concentration variations cause boiling point deviations
Solution Approach 1:
The control system is enhanced to perform multiple functions: it not only controls temperature but also monitors concentration and calculates the corresponding boiling point. The heating unit controller integrates both temperature control and boiling point management, using concentration data to adjust the target temperature setpoint. This multi-functional approach improves reliability without excessive complexity increase.
Solution Approach 2:
The system performs preliminary concentration measurement and boiling point calculation before temperature control begins. By measuring concentration first and calculating the expected boiling point in advance, the system can adjust the heating target temperature accordingly, ensuring accurate boiling point control from the start of the heating process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient heating of the processing liquid to a predetermined temperature in a short time while preventing excessive boiling, thereby enhancing the throughput and reducing contamination risks.
Implementation Method 1
a processing liquid heating unit configured to heat the processing liquid
Implementation Method 2
a concentration sensor configured to measure a concentration of the processing liquid
Implementation Method 3
a temperature sensor configured to measure a temperature of the processing liquid
Implementation Method 4
heating the processing liquid to boil the liquid at a predetermined temperature
Data Source
AI summary
Provided is a substrate liquid processing apparatus that processes a substrate with a processing liquid. The substrate liquid processing apparatus includes: a processing liquid storage unit configured to store the processing liquid therein; a processing liquid heating unit configured to heat the processing liquid, a controller configured to control the processing liquid heating unit; a temperature sensor; and a concentration sensor connected to the controller. The controller is configured to: measure a concentration of the processing liquid with the concentration sensor, measure a temperature of the processing liquid with the temperature sensor, calculate a boiling point corresponding to the measured concentration of the processing liquid, and control the output of the processing liquid heating unit, based on the boiling point and the measured temperature of the processing liquid.