Rotary Substrate Heating Control to Prevent Chuck Pin Overheating
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Solution Overview
Problem
Constituent members of substrate processing apparatuses, such as chuck pins, are overheated due to non-contact heating, leading to potential deformation and breakdown.
Innovation Solution
A substrate processing apparatus with a rotary holder, processing liquid supply, heater, temperature measurer, and stop controller to prevent overheating by monitoring and controlling the temperature of heating target objects, including the substrate and processing liquid, and stopping power supply to the heater when excessive temperatures are detected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If non-contact heating is used to heat the substrate and processing liquid, then the cleanliness of the substrate is maintained, but the constituent members (e.g., chuck pins) are overheated and may deform or break down
Solution Approach 1:
The patent segments the heating function by introducing a reflective member that redirects heating light away from the chuck pins. This divides the heating path into two segments: one that heats the substrate and processing liquid, and another that reflects heat away from the chuck pins, preventing their overheating while maintaining substrate cleanliness
Solution Approach 2:
The reflective member acts as an intermediary element that intercepts and redirects the heating light. It mediates between the heat source and the chuck pins, preventing direct heating of the constituent members while allowing the substrate to be heated effectively
2Productivity
If heating temperature and time are increased to improve processing efficiency, then the processing speed increases, but the risk of overheating constituent members increases
Solution Approach 1:
By segmenting the heating path with a reflective member, the system can apply higher heating temperatures and longer heating times to improve processing efficiency without proportionally increasing the temperature exposure of constituent members, thus maintaining reliability
Solution Approach 2:
The patent converts the harmful effect of excessive heating on chuck pins into a beneficial configuration by using the reflective member to redirect heat. The same heating light that could harm the chuck pins is redirected to further enhance substrate heating efficiency, turning a potential harm into a benefit
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents overheating of constituent members, ensuring the longevity and reliability of the apparatus by maintaining optimal temperature control.
Implementation Method 1
non-contact heating can be achieved by using a light emitting element such as an LED that irradiates the substrate with heating light as the heat source of the heating device
Implementation Method 2
using a light emitting element such as an LED that irradiates the substrate with heating light
Implementation Method 3
a temperature measurer arranged at a position facing the rotary holder and configured to measure a temperature of a heating target object heated by the heater in a non-contact manner
Data Source
AI summary
A substrate processing apparatus, includes: a rotary holder configured to hold and rotate a substrate; a processing liquid supply configured to supply a processing liquid to the substrate held and rotated by the rotary holder; a heater including a heat source configured to heat the substrate or the processing liquid in contact with the substrate in a non-contact manner; a temperature measurer arranged at a position facing the rotary holder and configured to measure a temperature of a heating target object heated by the heater in a non-contact manner; and a stop controller configured to stop supply of electric power to the heater when it is determined that the temperature measured by the temperature measurer exceeds a preset temperature.