Substrate Heating Unit with Grooved Sheet Bodies for Zone Control
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Solution Overview
Problem
Existing substrate liquid processing apparatuses face challenges in achieving uniform temperature distribution across the processing surface, particularly at the peripheral regions compared to the central regions, due to inadequate heating control between neighboring heating zones.
Innovation Solution
The apparatus incorporates a heating unit with multiple zones, where at least one of the sheet-shaped bodies has a groove at the boundary between zones, reducing heat conduction and allowing for precise temperature control by varying the heat transfer between adjacent heating zones, thereby ensuring uniform heating across the substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the processing liquid is heated uniformly across the entire processing surface, then the heating control is simple, but the temperature distribution becomes non-uniform due to heat conduction between neighboring heating zones
Solution Approach 1:
The heating unit is divided into multiple heating zones (first heating zone, second heating zone, third heating zone) with independent heating elements. Each zone can be controlled separately to achieve uniform temperature distribution across the processing surface, resolving the contradiction between simple control and temperature uniformity.
Solution Approach 2:
Different heating zones are provided with different heating characteristics tailored to their specific locations. The first heating zone has different heating properties compared to the second and third heating zones, allowing each region to achieve optimal temperature control for uniform overall heating.
2Temperature
If multiple heating zones are used to achieve uniform temperature distribution, then the temperature uniformity improves, but the device complexity increases
Solution Approach 1:
The heating unit is segmented into multiple zones with independent heating elements, allowing separate control of each zone to achieve uniform temperature distribution. This segmentation enables precise temperature control while maintaining manageable structural complexity through modular zone design.
Solution Approach 2:
The heating characteristics of different zones are optimized by adjusting parameters such as heating power and thermal conductivity. The first heating zone uses different heating parameters compared to the second and third zones, enabling uniform temperature distribution while controlling device complexity through parameter optimization rather than structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate heating control in units of processing zones, achieving a temperature difference of at least 10°C between neighboring zones, ensuring uniform processing liquid temperature across the substrate surface, thus improving the efficiency of liquid processing operations.
Implementation Method 1
heat generated from the heating unit is conducted between neighboring heating zones
Implementation Method 2
at least one of the first sheet-shaped body and the second sheet-shaped body has a groove, and the groove is provided at a region corresponding to a boundary between neighboring heating zones
Data Source
AI summary
A substrate liquid processing apparatus configured to perform a heating control over a processing liquid on a substrate with high accuracy in a unit of zones is provided. The substrate liquid processing apparatus includes a substrate holder configured to hold the substrate; a processing liquid supply configured to supply the processing liquid onto a processing surface of the substrate; and a heating unit configured to heat the processing liquid on the processing surface. The heating unit includes a heater, and a first sheet-shaped body and a second sheet-shaped body which are disposed to face the heater therebetween. The heater includes multiple heating elements provided in multiple heating zones of the heating unit.