Substrate Heating Window Mask for Stable Light Transmittance
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Solution Overview
Problem
Impurities vaporized from the surface of a substrate during processing can adhere to the transparent window of a substrate heating apparatus, reducing its transmittance and heating efficiency.
Innovation Solution
A light-transmitting mask member is provided between the transparent window and the substrate to block impurities, preventing them from reaching the window and allowing for easy exchange when the mask becomes dirty.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a transparent window is used to allow light transmission for substrate heating, then heating efficiency is improved, but impurities from the substrate can adhere to the window and reduce its transmittance over time
Solution Approach 1:
A light-transmitting mask member is introduced as an intermediary component positioned between the transparent window and the substrate. This mask member serves as a sacrificial element that intercepts impurities vaporized from the substrate, preventing them from adhering to the transparent window. The mask member can be easily replaced when contaminated, while the expensive transparent window maintains its transmittance and functionality.
Solution Approach 2:
The light-transmitting mask member is designed as a disposable or easily replaceable component with lower cost compared to the transparent window. It is intentionally positioned to accumulate impurities, serving as a sacrificial element that protects the more valuable transparent window. When the mask member becomes contaminated and its transmittance decreases, it can be replaced without affecting the long-term reliability of the heating system.
2Use of energy by moving object
If the transparent window is kept clean to maintain heating efficiency, then energy usage is improved, but cleaning or replacing the window increases maintenance complexity and time
Solution Approach 1:
The optical path is segmented into two distinct components: the transparent window and the light-transmitting mask member. This segmentation allows the mask member to be designed as a separate, easily replaceable component that can be quickly exchanged during maintenance without requiring removal or cleaning of the transparent window. The mask member absorbs the maintenance burden, allowing the window to remain in place and functional.
Solution Approach 2:
The mask member serves as a maintenance intermediary that simplifies the overall system maintenance. Instead of requiring cleaning or replacement of the expensive transparent window, the mask member is designed to be easily replaced when contaminated. This intermediary approach reduces maintenance complexity and time for the critical heating component while maintaining heating efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Maintains heating efficiency by preventing impurities from adhering to the transparent window and facilitating easy replacement of the mask to restore transmittance, thus ensuring consistent substrate heating performance.
Implementation Method 1
a heating light source configured to irradiate the substrate with an irradiation light via the transparent window and configured to heat the substrate
Data Source
AI summary
A substrate heating apparatus includes an accommodation chamber configured to accommodate a substrate, a transparent window provided on a wall portion of the accommodation chamber to face the substrate, a heating light source configured to irradiate the substrate with an irradiation light via the transparent window and configured to heat the substrate, and a light-transmitting mask member provided between the transparent window and the substrate.