Substrate Heating Element Wire Diameter for Thermal Uniformity
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Solution Overview
Problem
Substrate heating apparatuses face issues with temperature deviation and overheating due to the heating by an electric conductor supplying current to the heating element in the outer region, leading to non-uniform heating and structural instability.
Innovation Solution
A substrate heating apparatus with a first heating element in the inner region, a second heating element in the outer region, and a third heating element with a thicker wire diameter than the second heating element, passing through the inner region, to prevent overheating and ensure thermal uniformity by adjusting the heat distribution across regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a third heating element (electric conductor) is used to deliver current to the second heating element in the outer region, then the heating control for different regions is improved, but the third heating element causes overheating in the inner region due to its own heat generation
Solution Approach 1:
The patent applies different wire diameters to different heating elements based on their location and function. The third heating element (electric conductor) uses a thicker wire diameter than the second heating element, creating local quality differences that reduce resistance and prevent overheating in the inner region while maintaining effective heating control.
Solution Approach 2:
The patent changes the physical parameter of wire diameter for the third heating element compared to the second heating element. This parameter change reduces the electrical resistance of the third heating element, thereby reducing the heat generated by current flow and preventing overheating while maintaining the ability to control heating in different regions.
2Ease of manufacture
If the same wire diameter is used for all heating elements, then the manufacturing process is simplified, but temperature deviation occurs between inner and outer regions
Solution Approach 1:
The patent implements local quality by using different wire diameters for heating elements in different regions. The third heating element (electric conductor) uses a thicker wire diameter than the second heating element, optimizing heat distribution and reducing temperature deviation between inner and outer regions while maintaining reasonable manufacturing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents overheating and minimizes temperature deviation, maintaining thermal and structural stability by controlling heat distribution across the substrate heating apparatus, thereby improving thermal uniformity and structural stability during substrate processing.
Implementation Method 1
due to the heating in an electric conductor to supply current to the heating element in the outer region
Data Source
AI summary
The present invention relates to a substrate heating apparatus. More specifically, the present invention relates to a substrate heating apparatus including a first heating element located in an inner region of the substrate heating apparatus, a second heating element located in an outer region, and a third heating element supplying current to the second heating element passing through the inner region, wherein the diameter of a wire constituting the third heating element is thicker than the diameter of a wire constituting the second heating element, thereby inhibiting the generation of an overheating region by the heating of the third heating element.