Substrate Holder Conveyance Layout to Suppress Dust in Vacuum Chambers
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Solution Overview
Problem
Existing vacuum processing apparatuses generate dust during substrate holder conveyance due to the contact between drive unit protrusions and guide units, and they require longer times to deliver substrate holders from the discharge portion to the carry-in/carry-out mechanism, affecting processing efficiency and space utilization.
Innovation Solution
A vacuum processing apparatus with a conveying path forming a continuous ring shape on a vertical surface, utilizing anti-sag members with rotatable travel rollers and inclined guide units to prevent sagging and reduce contact between drive units and substrate holders, allowing for synchronized operation of drive units to shorten conveyance distances and enhance space efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If drive unit protrusions contact guide units to drive substrate holders, then substrate holders can be conveyed along the conveying path, but dust is generated during conveyance
Solution Approach 1:
The invention extracts the harmful contact interaction between drive unit protrusions and guide units by introducing a contactless drive mechanism. The drive unit protrusions generate a magnetic field that directly interacts with magnetic sensors or magnetic markers on the substrate holders, eliminating mechanical contact and thus dust generation while maintaining conveyance functionality.
Solution Approach 2:
The invention replaces the mechanical contact-based drive system with a magnetic field-based drive system. Instead of physical protrusions contacting guide units, magnetic fields are used to detect positions and drive substrate holders along the conveying path, substituting mechanical interaction with electromagnetic interaction to prevent dust generation.
2Productivity
If substrate holders are conveyed through a long path from discharge portion to carry-in/carry-out mechanism, then processing can be completed, but conveyance time increases
Solution Approach 1:
The invention introduces dynamic speed adjustment capabilities to the conveyance system. The drive units can vary their operating speed based on real-time conditions, allowing faster conveyance when possible and controlled slowing only when necessary for processing, thereby reducing overall conveyance time while ensuring complete processing.
Solution Approach 2:
The invention ensures continuous conveyance motion without unnecessary stops or delays. The magnetic field-based drive system maintains continuous propulsion of substrate holders through the conveying path, eliminating idle time and ensuring that the conveyance action is continuously productive from discharge to carry-in/carry-out.
3Area of stationary object
If conveyance drive members are positioned close to substrate holders to reduce space, then space efficiency improves, but contact and potential dust generation increase
Solution Approach 1:
The invention replaces mechanical contact systems with magnetic field-based systems, allowing drive units to be positioned close to substrate holders for compact space utilization while maintaining contactless operation. The magnetic fields extend through small gaps, enabling efficient space use without the dust generation associated with physical contact.
Solution Approach 2:
The invention changes the fundamental interaction parameter from mechanical contact to magnetic field interaction. This allows the drive units to operate at close proximity to substrate holders, optimizing space efficiency, while the non-contact magnetic coupling prevents dust generation that would occur with direct mechanical contact.
Data Source
AI summary
The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2. A travel roller 54 of the anti-sag member 35 travels while being guided and supported by a guide unit 17 that is provided below a return-path-side conveying portion 33c positioned on a lower side of a substrate holder conveying mechanism 3 and extends in a second conveying direction P2, and the first drive part 36 is configured to come into contact with a first driven unit 12 of a substrate holder 11 and drive the substrate holder 11 along the conveying path in the second conveying direction P2.