Transformable Substrate Holder for Outer-Edge Bonding Alignment
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in maintaining precise alignment and bonding of substrates due to relative differences in expansion or contraction between bonding surfaces, leading to deviations at the outer peripheral portions.
Innovation Solution
A substrate processing apparatus with a holder that includes an outer attraction portion and an inner attraction portion, where the outer attraction portion can be transformed relative to the inner attraction portion to correct distortions and maintain precise bonding by adjusting the attraction surface shape, using a transforming unit that changes the height of the outer peripheral side to align reference points accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fixed attraction surface is used to hold the substrate, then the holder structure is simple, but deviations occur at outer peripheral portions due to relative expansion or contraction between bonding surfaces
Solution Approach 1:
The attraction surface is designed to be transformable rather than fixed. The outer peripheral portion of the attraction surface can be dynamically adjusted in height relative to the inner portion, allowing the holder to adapt to expansion or contraction of the substrate during bonding processes, thereby maintaining alignment precision throughout the substrate area.
Solution Approach 2:
The attraction surface is divided into multiple independent regions: an inner attraction portion and an outer attraction portion. These segments can be adjusted independently, with the outer portion being transformable relative to the inner portion, enabling localized compensation for substrate distortion without requiring transformation of the entire surface.
2Manufacturing precision
If the outer attraction portion is made transformable to correct distortions, then alignment precision is improved, but the device complexity increases
Solution Approach 1:
Only the outer peripheral portion of the attraction surface is made transformable, while the inner portion remains fixed. This localized transformation approach provides sufficient correction for edge distortions without requiring the entire attraction surface to be complex and adjustable, thus balancing precision improvement with device simplicity.
3Manufacturing precision
If a rigid attraction surface is used, then the holder structure is simple, but reference point deviations increase at outer peripheral portions during substrate bonding
Solution Approach 1:
The outer peripheral portion of the attraction surface is designed with dynamic adjustability, allowing it to change height relative to the inner portion. This dynamic capability enables real-time compensation for substrate expansion or contraction, maintaining reference point alignment precision without requiring the entire structure to be complex.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces deviations between reference points on bonded substrates by allowing for precise adjustment of the outer attraction portion, ensuring accurate alignment and bonding across the entire substrate surface, even in cases of relative expansion or contraction.
Implementation Method 1
a holder that holds a substrate by attracting the substrate on an attraction surface
Data Source
AI summary
A substrate processing apparatus includes a holder configured to hold a substrate by attracting the substrate on an attraction surface. The attraction surface includes an outer attraction portion configured to attract an outer peripheral portion of the substrate and an inner attraction portion configured to attract a portion of the substrate at an inner side than the outer peripheral portion. The holder includes a transforming unit configured to transform the outer attraction portion relative to the inner attraction portion.