Substrate Holder With Elastic Protrusions for Clean Transfer
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Solution Overview
Problem
Existing substrate transfer devices face challenges in reliably holding and transferring substrates, particularly in preventing displacement and ensuring cleanliness during processing.
Innovation Solution
The substrate transfer device incorporates a substrate holder with a placing surface, suction holes, and protrusions blocked by elastic members, allowing for secure suction and positioning of substrates through controlled movement and suction flow paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If suction holes are provided on the placing surface to hold the substrate, then the substrate holding reliability is improved, but the substrate may come into contact with the suction holes causing contamination
Solution Approach 1:
The protrusions are configured to block the suction holes before substrate transfer occurs. This preliminary blocking action prevents substrate contact with suction holes while maintaining the suction capability when needed
Solution Approach 2:
The elastic members enable the protrusions to dynamically adjust their position. When suction is applied, the protrusions are pushed inward to allow substrate contact; when suction stops, they return to block the holes, providing adaptive protection
2Stability of the object's composition
If multiple suction holes are provided on the placing surface, then the substrate holding stability is improved, but the device complexity increases
Solution Approach 1:
The suction system is segmented into multiple independent suction holes, each capable of operating independently. This allows selective activation of suction holes based on substrate position and processing requirements
Solution Approach 2:
The multiple suction holes serve multiple functions: they can simultaneously or selectively hold substrates at different positions, provide adjustable suction distribution, and work in combination with multiple protrusions for enhanced control
3Object-affected harmful factors
If protrusions are used to block suction holes when substrate is not held, then substrate contamination is prevented, but the device complexity increases
Solution Approach 1:
The elastic members enable the protrusions to automatically block or unblock the suction holes based on the presence or absence of substrate-induced suction pressure, eliminating the need for external control mechanisms
Solution Approach 2:
The system uses suction pressure (pneumatics) to control the position of the protrusions. When suction is applied, pressure pushes protrusions inward; when suction stops, elastic force returns them to blocking position
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures reliable holding and transfer of substrates, suppressing displacement and maintaining cleanliness by adjusting suction points based on substrate position and state.
Implementation Method 1
a first elastic member configured to press the first protrusion upward, the second elastic member configured to press the second protrusion upward
Implementation Method 2
a first suction hole and a second suction hole provided to be open in the placing surface, a suction flow path connected to the first suction hole and the second suction hole
Data Source
AI summary
A substrate transfer device includes a substrate holder and a base to which the substrate holder is movably attached. The substrate holder includes first and second suction holes provided to be open in a placing surface, first and second protrusions disposed respectively in the first and second suction holes, and first and second supports provided respectively in the vicinity of the first and second suction holes so as to protrude upward from the placing surface. The first protrusion is pressed by a first elastic member toward an upward direction to protrude from the first suction hole such that the first protrusion blocks the first suction hole, and the second protrusion is pressed by a second elastic member toward an upward direction to protrude from the second suction hole such that the second protrusion blocks the second suction hole.