Substrate Holder Flow Passage Geometry for Laminar Fluid Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses face contamination issues due to turbulence in the flow of processing fluids, which causes impurities to adhere to the substrate, leading to poor cleanliness and process quality.
Innovation Solution
The apparatus features a substrate holder and chamber configuration with introduction and discharge flow passages that maintain a laminar flow by matching the cross-sectional shape of the flow passages with the gap space between the chamber walls and the substrate holder, preventing turbulence and impurity adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the processing fluid is supplied into the processing space through conventional flow passages, then the processing can be performed, but turbulence occurs in the flow causing impurities to adhere to the substrate
Solution Approach 1:
The flow passage cross-sectional shape is designed to match the gap space geometry at each location, creating locally adapted flow conditions that maintain laminar flow throughout the processing space. This local matching prevents turbulence and impurity adhesion to the substrate.
Solution Approach 2:
The invention changes the geometric parameters of the flow passage (cross-sectional shape) to match the gap space dimensions. By adjusting the flow passage geometry to correspond with the gap space, the flow regime transitions from turbulent to laminar, improving substrate cleanliness.
2Reliability
If the flow passage cross-sectional shape matches the gap space shape, then laminar flow is maintained preventing contamination, but the device structure becomes more complex
Solution Approach 1:
The flow passage and gap space are merged in design by making their cross-sectional shapes match. This integration simplifies the overall structure by eliminating the need for separate, complex flow control mechanisms while achieving laminar flow through the natural geometry matching.
3Reliability
If conventional sealing methods are used with elastic sealing members, then the airtightness is maintained, but impurities from the sealing member may contaminate the substrate
Solution Approach 1:
The elastic sealing member is extracted from the processing space and positioned in the buffer space instead. This separation removes the potential contamination source from the processing environment while maintaining airtightness through the sealing member's positioning in the buffer space rather than direct contact with the processing fluid path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses turbulence, preventing impurities from adhering to the substrate and ensuring a cleaner processing result by maintaining a laminar flow of processing fluids throughout the processing space.
Implementation Method 1
a shape of a discharge opening and a cross-sectional shape of a flow passage leading to the discharge opening are substantially the same as a cross-sectional shape of the gap space, so that a laminar flow formed in the flow passage on a side upstream of the discharge opening flows into the processing space while maintaining a state thereof
Implementation Method 2
the processing fluid can be caused to flow as a laminar flow having a substantially constant cross-sectional shape from the introduction flow passage on a side upstream of the processing space to the buffer space on a downstream side in the flowing direction of the processing fluid
Data Source
AI summary
A processing fluid flows into a processing space SP by way of a flow passage and discharge openings 174, 178 having substantially the same cross-sectional shape as that of a gap space formed in a clearance between a wall surface of the processing space SP and a substrate holder 15. On the other hand, the processing fluid having passed through the processing space SP is discharged to an outside via discharge flow passages 183, 187 after flowing into the buffer space 182, 186 having substantially the same width as the gap space. From these, the processing fluid can be caused to flow into the buffer space 182, 186 while the laminar flow state is maintained in the gap space. Thus, the generation of a turbulence in the processing space SP can be suppressed.