Device and method for retaining, rotating and heating and/or cooling a substrate

Solution Overview

Problem

Existing sample holders for rotating substrates, particularly in spin coating systems, face challenges with current transmission methods that lead to wear and spark risks, posing safety hazards due to the use of sliding contacts in flammable environments.

Innovation Solution

A device utilizing electromagnetic induction for power transmission and temperature control, decoupling mechanical and electrical components, allowing for contactless operation with primary and secondary windings to induce current and voltage in the rotor, eliminating the need for sliding contacts and enhancing safety.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If sliding contacts are used for current transmission to the rotating substrate holder, then power can be supplied to the heating element, but wear occurs and sparks are generated creating safety hazards

Engineering Contradiction:

Improvepower transmission to heating elementVSAvoidsafety in flammable environment

Core Design Contradiction:

Use of energy by moving objectVSReliability

Solution Approach 1:

The patent replaces the mechanical sliding contact system with an electromagnetic induction system. A stationary coil generates a magnetic field that induces current in a rotating conductor attached to the substrate holder, eliminating physical contact between stationary and rotating parts. This substitution removes wear and spark generation while maintaining power transmission capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a magnetic field as an intermediary between the stationary power source and the rotating substrate holder. The magnetic field serves as the medium for energy transfer without requiring direct physical contact, thus eliminating the harmful effects of sliding contacts while enabling continuous power supply during rotation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Use of energy by moving object

If sliding contacts are used for current transmission, then electrical connection is maintained, but wear between contact and collector occurs

Engineering Contradiction:

Improveelectrical connectionVSAvoidservice life of contact components

Core Design Contradiction:

Use of energy by moving objectVSDuration of action of moving object

Solution Approach 1:

The patent replaces the mechanical sliding contact system with an electromagnetic induction system. A stationary coil generates a magnetic field that induces current in a rotating conductor attached to the substrate holder, eliminating physical contact between stationary and rotating parts. This substitution removes wear and spark generation while maintaining power transmission capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Use of energy by moving object

If sparks are generated by sliding contacts, then current transmission is achieved, but risk of explosion or fire increases in flammable environments

Engineering Contradiction:

Improvecurrent transmissionVSAvoidexplosion and fire risk

Core Design Contradiction:

Use of energy by moving objectVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical sliding contact system with an electromagnetic induction system. A stationary coil generates a magnetic field that induces current in a rotating conductor attached to the substrate holder, eliminating physical contact between stationary and rotating parts. This substitution removes wear and spark generation while maintaining power transmission capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent converts the potentially harmful electromagnetic field into a beneficial tool for contactless power transmission. By using electromagnetic induction, the system eliminates sparks (a harmful effect of sliding contacts) while maintaining efficient energy transfer, thus turning a potential safety hazard into a safe and effective solution.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a wear-free and safe method for heating and cooling substrates by using electromagnetic induction, reducing the risk of sparks and explosions in flammable environments, while ensuring reliable and efficient power transmission during high-speed rotation.

Implementation Method 1

a current and/or a voltage can be induced in the at least one secondary winding through the at least one primary winding

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

the at least one heater being activated by the current and/or voltage induced in the at least one secondary winding

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Data Source

PatentEP3420782B1Device and method for retaining, rotating and heating and/or cooling a substrate

Publication Date: 2019.09.04 EV GRP E THALLNER GMBH

Figure 1a~1b
Figure 2a~2b
Figure 3a~3b

AI summary

A device and a method for retaining, rotating and heating a substrate are disclosed.