Substrate Holder Layout for Uniform Small-Lot Film Processing
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Solution Overview
Problem
In semiconductor manufacturing, small-lot production of substrates leads to non-uniform gas consumption and increased film formation differences between substrates due to inefficient substrate arrangement on boats, particularly when the number of substrates is less than the available slots, resulting in longer transfer times and reduced production efficiency.
Innovation Solution
A configuration that includes a substrate holder for both product and dummy substrates, a transfer mechanism, and a controller to divide and arrange substrates into groups, creating data for optimal distribution on the substrate holder to improve transfer efficiency and uniformity, using a combination of product and dummy substrate groups to enhance processing uniformity and reduce transfer time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If product substrates are transferred one by one to the boat, then the substrates can be arranged on the boat, but the transfer time becomes longer
Solution Approach 1:
The patent divides substrates into multiple groups (first group, second group, third group) and transfers them in batches rather than one by one. The transfer mechanism transfers multiple substrates simultaneously within each group, segmenting the overall transfer process into parallel batch operations that reduce total transfer time while maintaining arrangement flexibility.
Solution Approach 2:
The controller determines the arrangement positions of all substrate groups before transfer begins. The first group is transferred and arranged, then subsequent groups are transferred and arranged in predetermined positions based on pre-calculated placement strategies. This preliminary planning enables efficient batch transfer without sequential one-by-one placement.
2Productivity
If product substrates are transferred to a part of the boat when the number of substrates is smaller than the number of slots, then substrates can be mounted, but gas consumption becomes non-uniform and film formation difference increases
Solution Approach 1:
The patent introduces dummy substrates to fill empty slots, creating a uniform distribution pattern across the entire boat. The controller strategically places dummy substrates in specific positions to ensure that product substrates are evenly distributed throughout the furnace heating region. This local adjustment of substrate density ensures uniform gas consumption and consistent film formation across all product substrates.
Solution Approach 2:
Dummy substrates serve as intermediaries that occupy empty slots and facilitate uniform gas flow distribution. These dummy substrates act as placeholders that maintain the structural integrity of the substrate arrangement and ensure consistent thermal and gas exposure for all product substrates, thereby improving film formation uniformity.
3Manufacturing precision
If dummy substrates are introduced to fill empty slots, then film formation uniformity improves, but the complexity of substrate arrangement increases
Solution Approach 1:
The controller automatically performs the complex task of determining optimal arrangement positions for both product substrates and dummy substrates. The system self-manages the calculation of placement strategies, group divisions, and position assignments without requiring external intervention. This automation handles the arrangement complexity internally while presenting a simple interface for substrate loading.
Solution Approach 2:
The controller dynamically adjusts arrangement parameters based on the number of product substrates, boat slot capacity, and heating region characteristics. By changing parameters such as group size, position coordinates, and dummy substrate placement patterns, the system optimizes film formation uniformity while managing arrangement complexity through systematic parameter variation rather than fixed complex procedures.
Data Source
AI summary
There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.