Substrate Holder Leak Check via Multi-Stage Pressure Analysis
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Solution Overview
Problem
The existing electroplating processes face challenges in efficiently checking the sealing state of substrate holders to prevent plating solution leakage, which can lead to corrosion and hinder power supply, and current leak check methods decrease throughput due to their time-consuming nature.
Innovation Solution
A three-stage leak check method and apparatus that measure pressure thresholds in the internal space of the substrate holder, including a first inspection for vacuum creation, a second for pressure maintenance, and a third for pressure difference analysis, allowing for precise leakage determination and selection of leak check type based on plating conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a leak check is performed before plating of a substrate, then plating failures caused by contact between plating solution and electrical contacts are prevented, but the throughput decreases due to the time required for the leak check
Solution Approach 1:
The patent applies partial action by implementing a simplified leak check that performs only essential sealing verification rather than comprehensive inspection. The system determines whether basic sealing is sufficient based on plating conditions, performing a reduced leak check when sealing is confirmed and skipping detailed checks when not necessary, thus maintaining reliability while improving throughput
2Reliability
If the seal member is replaced or cleaned based on leakage detection, then the sealing state is restored, but the production time increases due to maintenance operations
Solution Approach 1:
The patent replaces mechanical maintenance operations with automated sensing and decision-making systems. Pressure sensors and control logic automatically detect leakage and determine appropriate actions, eliminating the need for manual inspection and reducing maintenance time while maintaining sealing reliability
3Measurement precision
If a comprehensive leak check is performed to accurately determine the degree of leakage, then the sealing state is precisely assessed, but the inspection time increases
Solution Approach 1:
The patent segments the leak check into multiple stages: an initial quick assessment using pressure change rate measurement, followed by detailed inspection only if necessary. This segmented approach achieves accurate leakage determination when needed while minimizing inspection time for normally sealed systems
Solution Approach 2:
The patent implements periodic action by performing rapid initial checks at regular intervals and conducting comprehensive assessments only when anomalies are detected. This allows the system to maintain high throughput through frequent quick checks while ensuring measurement precision through periodic detailed inspections
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables finer determination of leakage levels and improves throughput by tailoring the leak check to specific plating conditions, ensuring effective prevention of plating failures and optimizing the electroplating process.
Implementation Method 1
performing a first inspection of measuring a pressure in an internal space formed by a seal of the substrate holder, while evacuating the internal space
Implementation Method 2
performing a second inspection of closing the internal space that has been evacuated, measuring the pressure in the closed internal space
Data Source
AI summary
A leak check method includes: performing a first inspection of measuring a pressure in an internal space formed by a seal of the substrate holder, while evacuating the internal space, and detecting that the pressure reaches a first pressure threshold value within a predetermined first inspection time; performing a second inspection of closing the internal space that has been evacuated, measuring the pressure in the closed internal space, and detecting that the pressure in the closed internal space does not exceed a second pressure threshold value within a predetermined second inspection time; and performing a third inspection of measuring a pressure difference between the pressure in the closed internal space and a vacuum pressure in a master container, and detecting that an amount of increase in the pressure difference within a predetermined third inspection time is kept equal to or below a pressure difference threshold value.