Substrate Holder Leak Checking via Pressurized Gas Simulation
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Solution Overview
Problem
Conventional leak checking methods for substrate holders in electroplating apparatuses are not accurate in assessing the sealing performance, as they do not simulate the pressure conditions of the plating solution, leading to potential intrusion of plating solution into the hermetic space and contact with electrical contacts.
Innovation Solution
A leak checking apparatus and method that introduces a pressurized gas into a hermetic space formed between a sealing cap and the substrate holder, regulating pressure within a range similar to the expected plating solution pressure, to detect any leaks and assess the sealing performance of the substrate holder under conditions similar to those during electroplating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional leak checking methods are used, then the sealing performance of the substrate holder is tested, but the testing accuracy is insufficient because it does not simulate the pressure conditions of the plating solution
Solution Approach 1:
The patent applies parameter changes by introducing pressurized gas into the hermetic space to simulate the pressure conditions of the plating solution during electroplating. The pressure regulator adjusts the gas pressure to match the expected plating solution pressure, enabling accurate sealing performance testing under realistic operating conditions.
Solution Approach 2:
The patent uses pressurized gas as a copy or substitute for the plating solution to simulate its pressure effects during leak checking. By creating a hermetic space and introducing pressurized gas, the system replicates the pressure conditions that would exist during actual electroplating without requiring the plating solution itself, thereby improving measurement accuracy while maintaining adaptability.
2Reliability
If the sealing performance is not properly tested, then the substrate holder may be used, but plating solution can intrude into the hermetic space and contact the electrical contact
Solution Approach 1:
The patent implements preliminary action by performing leak checking before the substrate holder is used in electroplating. The hermetic space is formed and pressurized with gas to detect any sealing defects in advance, preventing plating solution intrusion and electrical contact contamination during actual operation.
Solution Approach 2:
The patent uses pressurized gas as an intermediary substance to detect sealing defects. The gas acts as a mediator between the testing system and the hermetic space, allowing detection of leaks without direct contact between the plating solution and electrical contacts, thereby ensuring reliability while preventing harmful factors.
3Measurement precision
If a hermetic space is formed with a sealing cap, then the sealing performance can be tested, but the device complexity increases
Solution Approach 1:
The sealing cap serves multiple functions: it forms the hermetic space, provides a sealing surface against the substrate holder, and acts as a mounting structure for the leak checking apparatus. This multi-functionality reduces the need for separate components, thereby improving measurement precision while limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for a more accurate evaluation of the sealing performance of the substrate holder, ensuring the integrity of the hermetic space and preventing plating solution intrusion during electroplating, thereby enhancing the reliability of the electroplating process.
Implementation Method 1
introducing a pressurized gas into the hermetic space
Implementation Method 2
regulating the pressure of the pressurized gas in the hermetic space with the pressure regulator based on the pressure command value
Implementation Method 3
detecting a decrease in pressure of the pressurized gas in the hermetic space
Data Source
AI summary
There is disclosed an improved leak checking method which can accurately test a sealing performance of a substrate holder more than conventional leak check techniques. The leak checking method includes: holding a substrate with a substrate holder, the substrate holder including a first holding member and a second holding member, the second holding member having an opening through which a surface of the substrate is exposed; pressing a sealing projection of the second holding member against the surface of the substrate when holding the substrate with the substrate holder; covering the surface of the substrate, exposed through the opening, and the sealing projection with a sealing cap; forming a hermetic space between the sealing cap and the substrate holder; introducing a pressurized gas into the hermetic space; and detecting a decrease in pressure of the pressurized gas in the hermetic space.