Substrate Holder Transfer Mechanism for Precise Linear Beam Scanning
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Solution Overview
Problem
Existing ion beam irradiation apparatuses require complex control to interlock two driving sources for precise reciprocating linear motion of a holder, making it difficult to achieve a rigorous linear movement of the substrate across the ion beam.
Innovation Solution
A substrate transfer device with a single driving source that uses a combination of shaft members, swing members, and conversion members to convert linear and rotational movements, allowing the holder to be reciprocatingly linearly displaced between defined points, thereby simplifying the control required for linear motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If two driving sources (arm extension-retraction motor and swing motor) are used to reciprocatingly linearly move the holder, then the holder can be moved across the ion beam, but the control system becomes complicated and difficult to interlock rigorously
Solution Approach 1:
The patent merges the functions of two separate driving sources (arm extension-retraction motor and swing motor) into a single driving source that simultaneously controls both the swing mechanism and the extension-retraction mechanism. This is achieved by mechanically coupling the swing arm's rotational movement to the linear extension-retraction movement through a conversion mechanism, allowing one motor to drive both degrees of freedom and thereby simplifying the control system while reducing the number of driving sources.
Solution Approach 2:
The patent introduces a conversion mechanism as an intermediary between the swing mechanism and the extension-retraction mechanism. This conversion mechanism transforms the rotational movement of the swing arm into linear extension-retraction movement of the holder, enabling a single driving source to control both movements through mechanical coupling rather than requiring separate motors for each degree of freedom.
2Device complexity
If a single driving source is used to reciprocatingly linearly move the holder, then the control system is simplified, but achieving precise linear motion becomes difficult when the holder is swingingly moved about a rotation axis
Solution Approach 1:
The patent introduces a conversion mechanism as an intermediary between the swing mechanism and the extension-retraction mechanism. This conversion mechanism transforms the rotational movement of the swing arm into linear extension-retraction movement of the holder, enabling a single driving source to control both movements through mechanical coupling rather than requiring separate motors for each degree of freedom.
Solution Approach 2:
The patent employs parameter changes by dynamically adjusting the relationship between the swing angle and the extension-retraction distance through the conversion mechanism. By establishing a specific functional relationship (parameter mapping) between the rotational parameter (swing angle) and the linear parameter (extension distance), the system achieves precise linear motion control despite using a single driving source, as the conversion mechanism ensures the holder moves along a linear trajectory.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and controlled reciprocating linear motion of the substrate holder across the ion beam with reduced complexity in control systems, improving the efficiency and accuracy of substrate transfer in semiconductor manufacturing processes.
Implementation Method 1
a linearly moving-side conversion member interposed between the shaft member and the linearly moving-side swing member and configured to convert a linear displacement of the linearly moving-side swing member with respect to the linearly moving-side support member to a rotational movement of the shaft member
Implementation Method 2
a holder-side conversion member interposed between the shaft member and the holder-side swing member and configured to convert a rotational movement of the shaft member to a linear displacement of the holder-side swing member with respect to the holder-side support member
Data Source
AI summary
A substrate transfer device includes a shaft member rotationally movable about a rotation axis, a first swing member coupled to a holder for holding a substrate, a first support member supporting the first swing member to be linearly displaced, a second swing member having a linearly moving part linearly displaceable, and a second support member supporting the second swing member to be linearly displaced The first support member is rotationally moved about the rotation axis integrally with the second support member together with the second swing member being linearly displaced with respect to the second support member in a manner interlocked with a linear movement of the linearly moving part, and the first swing member is linearly displaced with respect to the first support member via the shaft member, such that the holder is linearly displaced.