Substrate Holder Liquid Intrusion Detection
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Solution Overview
Problem
Existing substrate holder inspection methods struggle to detect small amounts of liquid intrusion, as the liquid may not reach the sensor, leading to undetected abnormalities in the substrate holder, which can result in non-uniform plating.
Innovation Solution
An inspection method and device that involves a substrate holder with a first and second member, where the second member is detachable and held by a substrate holder opening/closing unit, and a detector above the members to detect liquid adherence to a surface region, using an image sensor to acquire and compare image data to determine liquid presence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a liquid sensor is placed downstream in the drain pan to detect liquid intrusion, then the detection system is simple, but small amounts of liquid cannot be detected because they do not reach the sensor
Solution Approach 1:
The patent introduces a wick as an intermediary substance between the liquid intrusion source and the sensor. The wick absorbs and transports the liquid from the seal member surface to the liquid sensor, enabling detection of small liquid amounts that would otherwise not reach the sensor. This mediator resolves the contradiction by maintaining simple system architecture while achieving high detection sensitivity.
Solution Approach 2:
The patent replaces the direct mechanical flow-based detection system with an absorption-based detection system using a wick. Instead of relying on liquid flow to reach the sensor mechanically, the wick's capillary action absorbs and transports the liquid, enabling detection of minimal liquid intrusion while maintaining system simplicity.
2Manufacturing precision
If the substrate holder is sealed to prevent liquid penetration, then plating uniformity is maintained, but abnormalities in the seal member cannot be detected until liquid intrusion occurs
Solution Approach 1:
The patent implements preliminary detection action by placing the liquid sensor in direct contact with the seal member surface through a wick, enabling immediate detection of liquid intrusion as soon as it occurs. This preliminary detection capability allows abnormalities to be identified at the earliest stage, maintaining both plating uniformity and detection reliability.
Solution Approach 2:
The patent establishes a feedback mechanism where the liquid sensor continuously monitors the seal member surface for liquid intrusion and provides real-time feedback signals. This feedback system enables immediate response to seal abnormalities, ensuring both plating quality and reliable abnormality detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the detection of small amounts of liquid intrusion, ensuring timely identification of abnormalities in the substrate holder, thereby maintaining plating uniformity and preventing equipment misuse.
Implementation Method 1
a detector located above the first member and the second member to detect that the liquid adheres to the surface region of the first member
Data Source
AI summary
There is provided an inspection method of a substrate holder for holding a substrate. This inspection method has a step of providing the substrate holder comprising a first member and a second member between which a substrate is held, an electric contact, and a seal member, the first member having a surface region where intrusion of the liquid is prevented by the seal member, the second member having the seal member, a step of holding the second member by a holding portion of a substrate holder opening/closing unit, and detaching the second member from the first member, and a detection step of detecting that the liquid adheres to the surface region of the first member, by a detector located above the first member and the second member.