Substrate Holder Misalignment Prevention in Rotary Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in preventing misalignment of substrates during processing, particularly when both the rotary table and substrate holder are rotated, leading to uneven film formation and reduced in-plane uniformity.
Innovation Solution
The implementation of a substrate processing method and apparatus that includes a misalignment prevention mechanism, where the substrate is held by contact with at least three points on the substrate holder, combining a notch deviation prevention member and outer periphery deviation prevention members to securely maintain the substrate during rotation of both the rotary table and substrate holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the substrate holder is rotated about its own axis while the rotary table is rotated, then in-plane uniformity of film formation is improved, but substrate misalignment occurs
Solution Approach 1:
A notching mechanism is introduced as an intermediary component between the substrate holder and substrate. The notching mechanism includes a notched portion on the substrate holder and a corresponding notch on the substrate that engages with the notched portion, serving as a mediator to prevent substrate rotation and misalignment while allowing the substrate holder to rotate for uniform film formation.
Solution Approach 2:
The substrate is preliminarily positioned and secured in the substrate holder before the processing begins. The notching mechanism is pre-configured to engage the substrate in a specific orientation, ensuring that the substrate is correctly aligned before the dual rotation process starts, thereby preventing misalignment during film formation.
2Reliability
If contact holding with at least three points is implemented, then substrate misalignment is prevented, but device complexity increases
Solution Approach 1:
The substrate holder is segmented into distinct functional components: the holder body, the notching mechanism with notched portions, and the substrate contact portions. This segmentation allows each component to perform its specific function independently, making the complex contact holding requirement manageable through modular design rather than a monolithic structure.
Solution Approach 2:
The notching mechanism employs asymmetric geometry where the notched portions on the substrate holder and the corresponding notches on the substrate are designed with specific asymmetric shapes. This asymmetric design provides inherent alignment guidance and prevents substrate rotation, achieving reliable positioning stability through geometric constraint rather than complex mechanical adjustment mechanisms.
Data Source
AI summary
A method of processing a substrate, includes: mounting at least one substrate on at least one substrate holder configured to rotate about an axis of the at least one substrate holder, the at least one substrate holder being provided along a circumferential direction of a rotary table installed inside a processing chamber; holding the at least one substrate by the at least one substrate holder in a contact manner by bringing a substrate contact portion into contact with at least three points on a lateral surface of the at least one substrate mounted on the at least one substrate holder; and performing a substrate process while rotating the rotary table and rotating the at least one substrate holder about the axis of the at least one substrate holder in a state where the at least one substrate is held by the at least one substrate holder in the contact manner.