Substrate Holder Mounting Device Linear Arrangement
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Solution Overview
Problem
Conventional substrate holder container chambers face challenges in reducing size, complexity, and heating efficiency due to radial arrangement of carrying rails, which results in unnecessary space and high costs for multiple carrying parts, and inefficient heating distribution.
Innovation Solution
A substrate holder mounting device with a movable table mechanism for parallel arrangement of substrate holders, an up/down separation mechanism, and a link-up mechanism to simplify configuration, reduce space, and improve heating efficiency by allowing for more compact and cost-effective design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a radial arrangement of carrying rails is used, then substrate holders can be housed in a container chamber, but the device size becomes large due to expansion of arrangement radius when more rails are added
Solution Approach 1:
The patent transitions from a radial arrangement (2D circular pattern) to a linear parallel arrangement (1D straight line). This dimensional change allows substrate holders to be arranged in a compact linear sequence rather than requiring a large radial footprint, directly reducing the container chamber size while accommodating the same number of holders.
Solution Approach 2:
The patent divides the container chamber into multiple sections along a linear path, with carrying rails arranged in parallel segments. This segmentation allows efficient space utilization and enables the chamber to accommodate multiple substrate holders in a compact linear configuration rather than requiring a large radial area.
2Ease of operation
If a radial arrangement of carrying rails is used, then substrate holders can be transported, but the device structure becomes complex requiring multiple carrying parts and adjustment mechanisms
Solution Approach 1:
The patent employs a universal linear carrying mechanism where parallel rails and standardized carriers can transport substrate holders in a unified manner. This multi-functional linear system replaces the complex radial arrangement with a single type of carrying mechanism that can handle all substrate holders uniformly, reducing the variety and number of different carrying parts needed.
Solution Approach 2:
Instead of having carriers move radially outward from a central point requiring complex rotational mechanisms, the patent inverts the approach by using fixed parallel rails with linear motion. This inversion simplifies the structure by eliminating the need for complex radial adjustment mechanisms while maintaining transportation functionality.
3Quantity of substance
If a radial arrangement of carrying rails is used, then substrate holders can be housed, but heating efficiency becomes poor due to large arrangement range making it difficult to arrange heaters
Solution Approach 1:
The patent changes from radial distribution (2D circular pattern with large area) to linear arrangement (1D compact sequence). This dimensional change concentrates the substrate holders in a smaller spatial footprint, allowing heaters to be positioned effectively and distribute heat uniformly across all holders without the large arrangement range that plagues radial configurations.
Data Source
AI summary
A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.