Substrate Holder Position Deviation Detection and Alarm
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Solution Overview
Problem
Substrate processing apparatuses face accuracy issues due to position deviations of the substrate supporter during maintenance, leading to reduced processing precision.
Innovation Solution
A substrate processing apparatus equipped with a position detector and controller that moves the substrate holder to a target position, detects positional deviations, and outputs an alarm if the deviation exceeds a threshold, ensuring accurate substrate positioning and preventing processing with position deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the processing section is made movable to enable easy maintenance, then ease of repair is improved, but position deviation of the substrate supporter occurs leading to reduced manufacturing precision
Solution Approach 1:
A position detector detects the actual position of the substrate supporter, and the controller compares it with the reference position to calculate deviation amount. This feedback mechanism enables automatic detection and compensation of position deviations, resolving the contradiction between ease of maintenance and manufacturing precision.
Solution Approach 2:
The patent replaces mechanical positioning verification methods with an optical detection system (position detector). This substitution allows for precise, non-contact measurement of position deviations, enabling accurate detection even after maintenance operations.
2Ease of repair
If the substrate supporter is detached and reattached during maintenance, then ease of repair is improved, but position deviation occurs leading to reduced manufacturing precision
Solution Approach 1:
The position detector continuously monitors the substrate supporter position, and the controller calculates deviation from the reference position. After reattachment during maintenance, the system automatically detects any position deviation and can trigger alarms or compensation actions, maintaining precision despite repeated attachment cycles.
3Manufacturing precision
If position deviation detection and alarm functions are added, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The position detection and deviation calculation system operates automatically without requiring external intervention. The controller self-monitors the substrate supporter position and autonomously determines when deviations exceed thresholds, triggering alarms only when necessary. This self-service approach minimizes the impact of added complexity on system operation.
4Productivity
If the holder is moved to target position for substrate transfer, then productivity is improved, but position deviation detection capability is reduced
Solution Approach 1:
The position detector measures the substrate supporter position before the holder arrives at the target position. The controller calculates deviation amount in advance, allowing the system to alert operators or adjust positioning before the substrate transfer occurs, thus maintaining detection accuracy while enabling efficient automated transfer operations.
Data Source
AI summary
During a position deviation detection operation, a hand of a transport mechanism is moved to a true target position in a substrate supporter. A substrate supported at a preset reference position by the substrate supporter is received by the hand of the transport mechanism. A positional relationship between the substrate received by the hand and the hand is detected by a position detector. A deviation amount between the reference position and the true target position in the substrate supporter is acquired based on the detected positional relationship. An alarm is output in the case where the acquired deviation amount is larger than a predetermined threshold value.