Substrate Holder Positioning Without External Jigs

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Solution Overview

Problem

Existing substrate processing systems require expensive positioning devices to accurately position substrates, which can lead to positioning errors if not calibrated frequently and may necessitate multiple devices for different module shapes, increasing costs.

Innovation Solution

A substrate holder positioning method that measures the substrate's position using integrated position measuring devices and a substrate rotating unit to determine the center of rotation, allowing the substrate holder to be positioned without external positioning devices, using a substrate support unit with multiple support members to align the substrate correctly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If positioning devices are used to accurately position substrates, then positioning precision is improved, but device cost increases

Engineering Contradiction:

Improvepositioning precisionVSAvoiddevice cost

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The substrate holder itself serves as the positioning device by utilizing its own rotation function. The holder rotates the substrate to multiple positions where position measuring devices detect coordinates, and the control unit calculates the rotation center position from these measurements. This eliminates the need for separate external positioning devices, reducing cost while maintaining positioning precision.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The substrate holder is given multiple functions: it not only holds and transports the substrate but also serves as the positioning device through its rotation capability. The same rotational mechanism used for substrate processing is leveraged for positioning, eliminating the need for dedicated positioning hardware and reducing overall device complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Measurement precision

If positioning devices are used frequently, then positioning accuracy is maintained, but calibration time increases

Engineering Contradiction:

Improvepositioning accuracyVSAvoidcalibration time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The system continuously measures substrate position at multiple rotation points and feeds this information back to the control unit, which calculates the actual rotation center position. This feedback mechanism allows the system to self-correct and maintain positioning accuracy without frequent manual calibration, as the position is dynamically determined based on actual measurements during operation.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The position measuring devices are integrated with the substrate holder structure, allowing position measurements to be taken automatically during substrate loading and rotation operations. This preliminary positioning action is performed as part of the normal workflow rather than as a separate calibration step, eliminating dedicated calibration time while maintaining accuracy.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If multiple positioning devices are used for different module shapes, then positioning adaptability is improved, but device cost increases

Engineering Contradiction:

Improvepositioning adaptabilityVSAvoiddevice cost

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The substrate holder with integrated position measuring devices serves as a universal positioning solution that can adapt to different module shapes and processing requirements. The same holder-rotation-measurement system is used across different processing modules, eliminating the need for multiple specialized positioning devices and reducing overall system cost while maintaining adaptability.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system achieves adaptability to different module shapes by changing operational parameters (rotation angles, measurement positions, calculation algorithms) rather than changing physical positioning hardware. The control unit adjusts the rotation positions and calculation methods based on the specific module configuration, providing versatility without requiring multiple physical devices.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS9299599B2Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position

Publication Date: 2016.03.29 TOKYO ELECTRON LTD

AI summary

A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.